Recent developments in ceramic actuators

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Abstract

In these several years, piezoelectric and electrostrictive materials have bocome key components in smart actuator/sensor systems such as precision positioners, miniature ultrasonic motors and adaptive mechanical dampers. This paper reviews recent developments of piezoelectric and related ceramic actuators with particular focus on the improvement of actuator materials, device designs and drive/control techniques of actuators. Developments will be compared among USA, Japan and Europe.

Original languageEnglish (US)
Pages (from-to)46-57
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3321
DOIs
StatePublished - Dec 1 1996
EventSmart Materials, Structures, and MEMS - Bangalore, India
Duration: Dec 11 1996Dec 14 1996

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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