Relation between charge on free electrodes and the response of electrostatic MEMS actuators and sensors

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Stability is an important factor in the study of electrostatic MEMS switches and sensors. Their response is significantly improved by either applying a large dc bias or by depositing a prescribed value of charge on the oating electrodes. This charge is related to the pull-in voltages. Measurement of charge without causing loading is recommended; so instead of incorporating any field operated transistor circuitry for this purpose, methods are developed to relate the charge magnitude to the dynamical response of the actuators. Elata et al. developed eficient and reliable ways of charge monitoring without causing loading to the device. These methods rely on energy of the system instead of performing integration in the time domain. Based on their work, this paper examines the alterations in the dynamic response of actuators. The positive and negative pull-in voltages in the voltage displacement plane are symmetrically located with respect to charge on the oating electrode. This fact is exploited to carry out indirect charge measurement from the average of the two pull-in values. A regression scheme is proposed that predicts the charge from the voltage shift based on limited measurements of capacitance of the actuator.

Original languageEnglish (US)
Title of host publicationMicro- and Nanotechnology Sensors, Systems, and Applications IV
Volume8373
DOIs
StatePublished - Jul 23 2012
EventMicro- and Nanotechnology Sensors, Systems, and Applications IV - Baltimore, MD, United States
Duration: Apr 23 2012Apr 27 2012

Other

OtherMicro- and Nanotechnology Sensors, Systems, and Applications IV
CountryUnited States
CityBaltimore, MD
Period4/23/124/27/12

Fingerprint

Micro-electro-mechanical Systems
Electrostatics
microelectromechanical systems
MEMS
Electrode
Actuator
Actuators
actuators
Charge
electrostatics
Sensor
Electrodes
electrodes
sensors
Sensors
Electric potential
electric potential
Voltage
dynamic response
Dynamic response

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

@inproceedings{a2b0c633bb6f42d69510a9e8b3f4cb14,
title = "Relation between charge on free electrodes and the response of electrostatic MEMS actuators and sensors",
abstract = "Stability is an important factor in the study of electrostatic MEMS switches and sensors. Their response is significantly improved by either applying a large dc bias or by depositing a prescribed value of charge on the oating electrodes. This charge is related to the pull-in voltages. Measurement of charge without causing loading is recommended; so instead of incorporating any field operated transistor circuitry for this purpose, methods are developed to relate the charge magnitude to the dynamical response of the actuators. Elata et al. developed eficient and reliable ways of charge monitoring without causing loading to the device. These methods rely on energy of the system instead of performing integration in the time domain. Based on their work, this paper examines the alterations in the dynamic response of actuators. The positive and negative pull-in voltages in the voltage displacement plane are symmetrically located with respect to charge on the oating electrode. This fact is exploited to carry out indirect charge measurement from the average of the two pull-in values. A regression scheme is proposed that predicts the charge from the voltage shift based on limited measurements of capacitance of the actuator.",
author = "Nelatury, {Sudarshan Rao} and Robert Gray",
year = "2012",
month = "7",
day = "23",
doi = "10.1117/12.919391",
language = "English (US)",
isbn = "9780819490513",
volume = "8373",
booktitle = "Micro- and Nanotechnology Sensors, Systems, and Applications IV",

}

Nelatury, SR & Gray, R 2012, Relation between charge on free electrodes and the response of electrostatic MEMS actuators and sensors. in Micro- and Nanotechnology Sensors, Systems, and Applications IV. vol. 8373, 83732P, Micro- and Nanotechnology Sensors, Systems, and Applications IV, Baltimore, MD, United States, 4/23/12. https://doi.org/10.1117/12.919391

Relation between charge on free electrodes and the response of electrostatic MEMS actuators and sensors. / Nelatury, Sudarshan Rao; Gray, Robert.

Micro- and Nanotechnology Sensors, Systems, and Applications IV. Vol. 8373 2012. 83732P.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Relation between charge on free electrodes and the response of electrostatic MEMS actuators and sensors

AU - Nelatury, Sudarshan Rao

AU - Gray, Robert

PY - 2012/7/23

Y1 - 2012/7/23

N2 - Stability is an important factor in the study of electrostatic MEMS switches and sensors. Their response is significantly improved by either applying a large dc bias or by depositing a prescribed value of charge on the oating electrodes. This charge is related to the pull-in voltages. Measurement of charge without causing loading is recommended; so instead of incorporating any field operated transistor circuitry for this purpose, methods are developed to relate the charge magnitude to the dynamical response of the actuators. Elata et al. developed eficient and reliable ways of charge monitoring without causing loading to the device. These methods rely on energy of the system instead of performing integration in the time domain. Based on their work, this paper examines the alterations in the dynamic response of actuators. The positive and negative pull-in voltages in the voltage displacement plane are symmetrically located with respect to charge on the oating electrode. This fact is exploited to carry out indirect charge measurement from the average of the two pull-in values. A regression scheme is proposed that predicts the charge from the voltage shift based on limited measurements of capacitance of the actuator.

AB - Stability is an important factor in the study of electrostatic MEMS switches and sensors. Their response is significantly improved by either applying a large dc bias or by depositing a prescribed value of charge on the oating electrodes. This charge is related to the pull-in voltages. Measurement of charge without causing loading is recommended; so instead of incorporating any field operated transistor circuitry for this purpose, methods are developed to relate the charge magnitude to the dynamical response of the actuators. Elata et al. developed eficient and reliable ways of charge monitoring without causing loading to the device. These methods rely on energy of the system instead of performing integration in the time domain. Based on their work, this paper examines the alterations in the dynamic response of actuators. The positive and negative pull-in voltages in the voltage displacement plane are symmetrically located with respect to charge on the oating electrode. This fact is exploited to carry out indirect charge measurement from the average of the two pull-in values. A regression scheme is proposed that predicts the charge from the voltage shift based on limited measurements of capacitance of the actuator.

UR - http://www.scopus.com/inward/record.url?scp=84863927932&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84863927932&partnerID=8YFLogxK

U2 - 10.1117/12.919391

DO - 10.1117/12.919391

M3 - Conference contribution

SN - 9780819490513

VL - 8373

BT - Micro- and Nanotechnology Sensors, Systems, and Applications IV

ER -