Relaxation in nanoscale freestanding gold films using MEMS

B. A. Samuel, A. V. Desai, M. A. Haque

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

We present experimental results to describe the stress relaxation behavior of thin (125 nm) freestanding gold films at room temperature. The experiments were performed inside a field emission scanning microscope using a MEMS-based test bed which is only 3mm × 10mm in size. The effect of stress relaxation on the young's modulus of gold thin films is observed. The thin film specimen used in the experiment is co-fabricated with the micromechanical loading device and hence eliminates problems of alignment and gripping. Freestanding thin films provide us with information about the mechanical behavior of thin films in the absence of substrate effects.

Original languageEnglish (US)
Title of host publicationProceedings of the ASME Materials Division 2005
Pages255-258
Number of pages4
DOIs
StatePublished - Dec 1 2005
Event2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005 - Orlando, FL, United States
Duration: Nov 5 2005Nov 11 2005

Publication series

NameAmerican Society of Mechanical Engineers, Materials Division (Publication) MD
Volume100 MD
ISSN (Print)1071-6939

Other

Other2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005
CountryUnited States
CityOrlando, FL
Period11/5/0511/11/05

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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