Reliability concerns for HfO2/Si (and (ZrO2/Si) systems: Interface and dielectric traps

A. Y. Kang, Patrick M. Lenahan, J. F. Vonley, Y. Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Fingerprint Dive into the research topics of 'Reliability concerns for HfO<sub>2</sub>/Si (and (ZrO<sub>2</sub>/Si) systems: Interface and dielectric traps'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science