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Reliability of microelectromechanical systems (MEMS)
Srinivas Tadigadapa, Nader Najafi
Materials Research Institute (MRI)
Research output
:
Contribution to journal
›
Article
›
peer-review
26
Scopus citations
Overview
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Dive into the research topics of 'Reliability of microelectromechanical systems (MEMS)'. Together they form a unique fingerprint.
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Mathematics
Micro-electro-mechanical Systems
100%
Microsystems
49%
Packaging
42%
Fabrication
27%
Design
24%
Pressure Sensor
20%
Failure Mechanism
15%
Repeatability
14%
Design Process
14%
Testing
13%
Infrastructure
13%
Sensing
13%
System Reliability
12%
Chip
12%
Performance
11%
Vacuum
10%
Compatibility
10%
Partitioning
9%
Optimization
7%
Output
7%
Costs
7%
Chemical Compounds
Pressure Sensor
96%
Vacuum
55%
Time
24%
Application
21%
Engineering & Materials Science
MEMS
64%
Microsystems
31%
Packaging
23%
Vacuum applications
15%
Fabrication
12%
Capacitive sensors
11%
Pressure sensors
9%
Testing
8%
Compensation and Redress
6%
Geometry
5%
Costs
3%
Physics & Astronomy
microelectromechanical systems
66%
packaging
27%
products
16%
fabrication
10%
pressure sensors
9%
high vacuum
9%
compatibility
8%
performance
7%
chips
6%
costs
6%
optimization
5%
output
5%
geometry
4%