Repetitive control of an electrostatic microbridge actuator

Haiyu Zhao, Christopher D. Rahn, Huseyin Canbolat

Research output: Contribution to conferencePaper

2 Scopus citations

Abstract

Electrostatic microactuators are used extensively in MEMS sensors, RF switches, and microfluidic pumps. Due to high bandwidth operation, however, reduction of residual vibration using feedback control is difficult to implement. This paper designs, proves stability, and simulates a feedforward repetitive controller for an electrostatic microbridge. Squeeze film damping ensures boundedness of the distributed transverse displacement. Offline processing using repetitive control algorithm updates a waveform generator's parameters based on measured response to reduce errors between the desired and actual displacement distribution. Simulations show a 36% reduction in midspan overshoot.

Original languageEnglish (US)
Pages453-460
Number of pages8
DOIs
Publication statusPublished - Jan 1 2005
Event2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005 - Orlando, FL, United States
Duration: Nov 5 2005Nov 11 2005

Other

Other2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005
CountryUnited States
CityOrlando, FL
Period11/5/0511/11/05

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All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering

Cite this

Zhao, H., Rahn, C. D., & Canbolat, H. (2005). Repetitive control of an electrostatic microbridge actuator. 453-460. Paper presented at 2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005, Orlando, FL, United States. https://doi.org/10.1115/IMECE2005-80019