Repetitive control of an electrostatic microbridge actuator

Haiyu Zhao, Christopher D. Rahn, Huseyin Canbolat

Research output: Contribution to conferencePaper

2 Citations (Scopus)

Abstract

Electrostatic microactuators are used extensively in MEMS sensors, RF switches, and microfluidic pumps. Due to high bandwidth operation, however, reduction of residual vibration using feedback control is difficult to implement. This paper designs, proves stability, and simulates a feedforward repetitive controller for an electrostatic microbridge. Squeeze film damping ensures boundedness of the distributed transverse displacement. Offline processing using repetitive control algorithm updates a waveform generator's parameters based on measured response to reduce errors between the desired and actual displacement distribution. Simulations show a 36% reduction in midspan overshoot.

Original languageEnglish (US)
Pages453-460
Number of pages8
DOIs
StatePublished - Jan 1 2005
Event2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005 - Orlando, FL, United States
Duration: Nov 5 2005Nov 11 2005

Other

Other2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005
CountryUnited States
CityOrlando, FL
Period11/5/0511/11/05

Fingerprint

Electrostatic actuators
Electrostatics
Microactuators
Vibration control
Microfluidics
Feedback control
MEMS
Damping
Switches
Pumps
Bandwidth
Controllers
Sensors
Processing

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering

Cite this

Zhao, H., Rahn, C. D., & Canbolat, H. (2005). Repetitive control of an electrostatic microbridge actuator. 453-460. Paper presented at 2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005, Orlando, FL, United States. https://doi.org/10.1115/IMECE2005-80019
Zhao, Haiyu ; Rahn, Christopher D. ; Canbolat, Huseyin. / Repetitive control of an electrostatic microbridge actuator. Paper presented at 2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005, Orlando, FL, United States.8 p.
@conference{ccbd2c63a8894f7b8a51aea6c5c32a89,
title = "Repetitive control of an electrostatic microbridge actuator",
abstract = "Electrostatic microactuators are used extensively in MEMS sensors, RF switches, and microfluidic pumps. Due to high bandwidth operation, however, reduction of residual vibration using feedback control is difficult to implement. This paper designs, proves stability, and simulates a feedforward repetitive controller for an electrostatic microbridge. Squeeze film damping ensures boundedness of the distributed transverse displacement. Offline processing using repetitive control algorithm updates a waveform generator's parameters based on measured response to reduce errors between the desired and actual displacement distribution. Simulations show a 36{\%} reduction in midspan overshoot.",
author = "Haiyu Zhao and Rahn, {Christopher D.} and Huseyin Canbolat",
year = "2005",
month = "1",
day = "1",
doi = "10.1115/IMECE2005-80019",
language = "English (US)",
pages = "453--460",
note = "2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005 ; Conference date: 05-11-2005 Through 11-11-2005",

}

Zhao, H, Rahn, CD & Canbolat, H 2005, 'Repetitive control of an electrostatic microbridge actuator', Paper presented at 2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005, Orlando, FL, United States, 11/5/05 - 11/11/05 pp. 453-460. https://doi.org/10.1115/IMECE2005-80019

Repetitive control of an electrostatic microbridge actuator. / Zhao, Haiyu; Rahn, Christopher D.; Canbolat, Huseyin.

2005. 453-460 Paper presented at 2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005, Orlando, FL, United States.

Research output: Contribution to conferencePaper

TY - CONF

T1 - Repetitive control of an electrostatic microbridge actuator

AU - Zhao, Haiyu

AU - Rahn, Christopher D.

AU - Canbolat, Huseyin

PY - 2005/1/1

Y1 - 2005/1/1

N2 - Electrostatic microactuators are used extensively in MEMS sensors, RF switches, and microfluidic pumps. Due to high bandwidth operation, however, reduction of residual vibration using feedback control is difficult to implement. This paper designs, proves stability, and simulates a feedforward repetitive controller for an electrostatic microbridge. Squeeze film damping ensures boundedness of the distributed transverse displacement. Offline processing using repetitive control algorithm updates a waveform generator's parameters based on measured response to reduce errors between the desired and actual displacement distribution. Simulations show a 36% reduction in midspan overshoot.

AB - Electrostatic microactuators are used extensively in MEMS sensors, RF switches, and microfluidic pumps. Due to high bandwidth operation, however, reduction of residual vibration using feedback control is difficult to implement. This paper designs, proves stability, and simulates a feedforward repetitive controller for an electrostatic microbridge. Squeeze film damping ensures boundedness of the distributed transverse displacement. Offline processing using repetitive control algorithm updates a waveform generator's parameters based on measured response to reduce errors between the desired and actual displacement distribution. Simulations show a 36% reduction in midspan overshoot.

UR - http://www.scopus.com/inward/record.url?scp=33645020804&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33645020804&partnerID=8YFLogxK

U2 - 10.1115/IMECE2005-80019

DO - 10.1115/IMECE2005-80019

M3 - Paper

AN - SCOPUS:33645020804

SP - 453

EP - 460

ER -

Zhao H, Rahn CD, Canbolat H. Repetitive control of an electrostatic microbridge actuator. 2005. Paper presented at 2005 ASME International Mechanical Engineering Congress and Exposition, IMECE 2005, Orlando, FL, United States. https://doi.org/10.1115/IMECE2005-80019