Resolution limitations in chemically amplified photoresist systems

Gerard M. Schmid, Michael D. Stewart, Chia Ying Wang, Bryan D. Vogt, Vivek M. Prabhu, Eric K. Lin, C. Grant Willson

Research output: Contribution to journalConference articlepeer-review

40 Scopus citations

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Mathematics

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy