Retrospective sputter depth profiling using 3D mass spectral imaging

Leiliang Zheng, Andreas Wucher, Nicholas Winograd

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

A molecular multilayer stack composed of alternating Langmuir-Blodgett films was analyzed by ToF-SIMS imaging in combination with intermediate sputter erosion using a focused C60+ cluster ion beam. From the resulting dataset, depth profiles of any desired lateral portion of the analyzed field-of-view can be extracted in retrospect, allowing the influence of the gating area on the apparent depth resolution to be assessed. In a similar way, the observed degradation of depth resolution with increasing depth of the analyzed interface can be analyzed in order to determine the 'intrinsic' depth resolution of the method.

Original languageEnglish (US)
Pages (from-to)41-44
Number of pages4
JournalSurface and Interface Analysis
Volume43
Issue number1-2
DOIs
StatePublished - Jan 2011

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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