Retrospective sputter depth profiling using 3D mass spectral imaging

Leiliang Zheng; Andreas Wucher; Nicholas Winograd

doi:10.1002/sia.3509

Retrospective sputter depth profiling using 3D mass spectral imaging

Leiliang Zheng, Andreas Wucher, Nicholas Winograd

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

A molecular multilayer stack composed of alternating Langmuir-Blodgett films was analyzed by ToF-SIMS imaging in combination with intermediate sputter erosion using a focused C₆₀⁺ cluster ion beam. From the resulting dataset, depth profiles of any desired lateral portion of the analyzed field-of-view can be extracted in retrospect, allowing the influence of the gating area on the apparent depth resolution to be assessed. In a similar way, the observed degradation of depth resolution with increasing depth of the analyzed interface can be analyzed in order to determine the 'intrinsic' depth resolution of the method.

Original language	English (US)
Pages (from-to)	41-44
Number of pages	4
Journal	Surface and Interface Analysis
Volume	43
Issue number	1-2
DOIs	https://doi.org/10.1002/sia.3509
State	Published - Jan 2011

All Science Journal Classification (ASJC) codes

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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title = "Retrospective sputter depth profiling using 3D mass spectral imaging",

abstract = "A molecular multilayer stack composed of alternating Langmuir-Blodgett films was analyzed by ToF-SIMS imaging in combination with intermediate sputter erosion using a focused C60+ cluster ion beam. From the resulting dataset, depth profiles of any desired lateral portion of the analyzed field-of-view can be extracted in retrospect, allowing the influence of the gating area on the apparent depth resolution to be assessed. In a similar way, the observed degradation of depth resolution with increasing depth of the analyzed interface can be analyzed in order to determine the 'intrinsic' depth resolution of the method.",

author = "Leiliang Zheng and Andreas Wucher and Nicholas Winograd",

year = "2011",

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AB - A molecular multilayer stack composed of alternating Langmuir-Blodgett films was analyzed by ToF-SIMS imaging in combination with intermediate sputter erosion using a focused C60+ cluster ion beam. From the resulting dataset, depth profiles of any desired lateral portion of the analyzed field-of-view can be extracted in retrospect, allowing the influence of the gating area on the apparent depth resolution to be assessed. In a similar way, the observed degradation of depth resolution with increasing depth of the analyzed interface can be analyzed in order to determine the 'intrinsic' depth resolution of the method.

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