RF dielectric loss due to MOCVD aluminum nitride on high resistivity silicon

Feyza Berber, Derek W. Johnson, Kyle M. Sundqvist, Edwin L. Piner, Gregory H. Huff, H. Rusty Harris

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Fingerprint

Dive into the research topics of 'RF dielectric loss due to MOCVD aluminum nitride on high resistivity silicon'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy