RF MEMS piezoelectric switch

S. J. Gross; Q. Q. Zhang; Susan E. Trolier-McKinstry; Srinivas A. Tadigadapa; Thomas Nelson Jackson

doi:10.1109/DRC.2003.1226891

RF MEMS piezoelectric switch

S. J. Gross, Q. Q. Zhang, Susan E. Trolier-McKinstry, Srinivas A. Tadigadapa, Thomas Nelson Jackson

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Scopus citations

Abstract

In this paper discussed about the fabrication PbZrTiO₃ film for switch. This fabricated switches were tested and resonance frequency measurements also carried out.

Original language	English (US)
Title of host publication	61st Device Research Conference, DRC 2003 - Conference Digest
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	99-100
Number of pages	2
ISBN (Electronic)	0780377273
DOIs	https://doi.org/10.1109/DRC.2003.1226891
State	Published - Jan 1 2003
Event	61st Device Research Conference, DRC 2003 - Salt Lake City, United States Duration: Jun 23 2003 → Jun 25 2003

Publication series

Name	Device Research Conference - Conference Digest, DRC
Volume	2003-January
ISSN (Print)	1548-3770

Other

Other	61st Device Research Conference, DRC 2003
Country	United States
City	Salt Lake City
Period	6/23/03 → 6/25/03

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Access to Document

10.1109/DRC.2003.1226891

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Gross, S. J., Zhang, Q. Q., Trolier-McKinstry, S. E., Tadigadapa, S. A., & Jackson, T. N. (2003). RF MEMS piezoelectric switch. In 61st Device Research Conference, DRC 2003 - Conference Digest (pp. 99-100). [1226891] (Device Research Conference - Conference Digest, DRC; Vol. 2003-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DRC.2003.1226891

@inproceedings{70651236cefd4ec38f421f379f39d2bd,

title = "RF MEMS piezoelectric switch",

abstract = "In this paper discussed about the fabrication PbZrTiO3 film for switch. This fabricated switches were tested and resonance frequency measurements also carried out.",

author = "Gross, {S. J.} and Zhang, {Q. Q.} and Trolier-McKinstry, {Susan E.} and Tadigadapa, {Srinivas A.} and Jackson, {Thomas Nelson}",

year = "2003",

month = jan,

day = "1",

doi = "10.1109/DRC.2003.1226891",

language = "English (US)",

series = "Device Research Conference - Conference Digest, DRC",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "99--100",

booktitle = "61st Device Research Conference, DRC 2003 - Conference Digest",

address = "United States",

note = "61st Device Research Conference, DRC 2003 ; Conference date: 23-06-2003 Through 25-06-2003",

}

Gross, SJ, Zhang, QQ, Trolier-McKinstry, SE, Tadigadapa, SA & Jackson, TN 2003, RF MEMS piezoelectric switch. in 61st Device Research Conference, DRC 2003 - Conference Digest., 1226891, Device Research Conference - Conference Digest, DRC, vol. 2003-January, Institute of Electrical and Electronics Engineers Inc., pp. 99-100, 61st Device Research Conference, DRC 2003, Salt Lake City, United States, 6/23/03. https://doi.org/10.1109/DRC.2003.1226891

RF MEMS piezoelectric switch. / Gross, S. J.; Zhang, Q. Q.; Trolier-McKinstry, Susan E.; Tadigadapa, Srinivas A.; Jackson, Thomas Nelson.

61st Device Research Conference, DRC 2003 - Conference Digest. Institute of Electrical and Electronics Engineers Inc., 2003. p. 99-100 1226891 (Device Research Conference - Conference Digest, DRC; Vol. 2003-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - RF MEMS piezoelectric switch

AU - Gross, S. J.

AU - Zhang, Q. Q.

AU - Trolier-McKinstry, Susan E.

AU - Tadigadapa, Srinivas A.

AU - Jackson, Thomas Nelson

PY - 2003/1/1

Y1 - 2003/1/1

N2 - In this paper discussed about the fabrication PbZrTiO3 film for switch. This fabricated switches were tested and resonance frequency measurements also carried out.

AB - In this paper discussed about the fabrication PbZrTiO3 film for switch. This fabricated switches were tested and resonance frequency measurements also carried out.

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U2 - 10.1109/DRC.2003.1226891

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M3 - Conference contribution

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T3 - Device Research Conference - Conference Digest, DRC

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BT - 61st Device Research Conference, DRC 2003 - Conference Digest

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 61st Device Research Conference, DRC 2003

Y2 - 23 June 2003 through 25 June 2003

ER -

RF MEMS piezoelectric switch

Abstract

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All Science Journal Classification (ASJC) codes

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