RF MEMS piezoelectric switch

S. J. Gross, Q. Q. Zhang, Susan E. Trolier-McKinstry, Srinivas A. Tadigadapa, Thomas Nelson Jackson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

In this paper discussed about the fabrication PbZrTiO3 film for switch. This fabricated switches were tested and resonance frequency measurements also carried out.

Original languageEnglish (US)
Title of host publication61st Device Research Conference, DRC 2003 - Conference Digest
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages99-100
Number of pages2
ISBN (Electronic)0780377273
DOIs
StatePublished - Jan 1 2003
Event61st Device Research Conference, DRC 2003 - Salt Lake City, United States
Duration: Jun 23 2003Jun 25 2003

Publication series

NameDevice Research Conference - Conference Digest, DRC
Volume2003-January
ISSN (Print)1548-3770

Other

Other61st Device Research Conference, DRC 2003
CountryUnited States
CitySalt Lake City
Period6/23/036/25/03

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'RF MEMS piezoelectric switch'. Together they form a unique fingerprint.

Cite this