@inproceedings{70651236cefd4ec38f421f379f39d2bd,
title = "RF MEMS piezoelectric switch",
abstract = "In this paper discussed about the fabrication PbZrTiO3 film for switch. This fabricated switches were tested and resonance frequency measurements also carried out.",
author = "Gross, {S. J.} and Zhang, {Q. Q.} and Trolier-McKinstry, {Susan E.} and Tadigadapa, {Srinivas A.} and Jackson, {Thomas Nelson}",
year = "2003",
month = jan,
day = "1",
doi = "10.1109/DRC.2003.1226891",
language = "English (US)",
series = "Device Research Conference - Conference Digest, DRC",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "99--100",
booktitle = "61st Device Research Conference, DRC 2003 - Conference Digest",
address = "United States",
note = "61st Device Research Conference, DRC 2003 ; Conference date: 23-06-2003 Through 25-06-2003",
}