Ring PMUT array based miniaturized photoacoustic endoscopy device

Ajay Dangi, Sumit Agrawal, Sudhanshu Tiwari, Shubham Jadhav, Christopher Cheng, Gaurav Ramesh Datta, Susan E. Trolier-McKinstry, Rudra Pratap, Sri-Rajasekhar Kothapalli

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The first successful validation of a forward-looking Piezoelectric Micromachined Ultrasound Transducer (PMUT) ring array designed for photoacoustic endoscopic imaging applications is presented. PMUT ring arrays were fabricated with a 0.5 mm inner diameter, to allow insertion of an optical fiber for light delivery, and ∼2.5 mm overall outer diameter. Each ring array consisted of 6 elements, with a total of 102 PMUT cells, or 17 cells per element. Each PMUT cell has a 100 μm diameter multi-layered diaphragm having a ∼700 nm thick c-axis oriented aluminium nitride (AlN) thin film as the piezoelectric layer over a Si (handle layer) / SiO2 (1 μm) / Si (10 μm) / SiO2 (100 nm) / TiO2 (40 nm) / Pt (150 nm) substrate to act as an ultrasound receive element. The resonant frequency was ∼ 6 MHz in water. The output end of an optical fiber, coupled to a pulsed laser diode (PLD), was fitted with a 2.5 mm ferrule. The PMUT ring array was concentrically mounted on the ferrule to obtain a miniaturized endoscopic PAI device. The observed photoacoustic bandwidth was ∼75%, and a strong photoacoustic signal of ∼13 mV peak-to-peak output was observed from a light absorbing target kept 5 mm away from the PMUT array. 2D and 3D photoacoustic images of the targets were obtained via raster scanning of the phantom sample. In the future, the functionality of the PMUT ring array will be enhanced through multichannel acquisition to obtain variable acoustic focus and limited view photoacoustic images in real time.

Original languageEnglish (US)
Title of host publicationPhotons Plus Ultrasound
Subtitle of host publicationImaging and Sensing 2019
EditorsAlexander A. Oraevsky, Lihong V. Wang
PublisherSPIE
ISBN (Electronic)9781510623989
DOIs
StatePublished - Jan 1 2019
EventPhotons Plus Ultrasound: Imaging and Sensing 2019 - San Francisco, United States
Duration: Feb 3 2019Feb 6 2019

Publication series

NameProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume10878
ISSN (Print)1605-7422

Conference

ConferencePhotons Plus Ultrasound: Imaging and Sensing 2019
CountryUnited States
CitySan Francisco
Period2/3/192/6/19

Fingerprint

Endoscopy
Photoacoustic effect
Transducers
transducers
Ultrasonics
Equipment and Supplies
rings
Optical Fibers
optical fibers
cells
raster scanning
Light
Polyamideimides
output
aluminum nitrides
Optical fiber coupling
diaphragms
Aluminum nitride
Diaphragm
Acoustics

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Biomaterials
  • Radiology Nuclear Medicine and imaging

Cite this

Dangi, A., Agrawal, S., Tiwari, S., Jadhav, S., Cheng, C., Datta, G. R., ... Kothapalli, S-R. (2019). Ring PMUT array based miniaturized photoacoustic endoscopy device. In A. A. Oraevsky, & L. V. Wang (Eds.), Photons Plus Ultrasound: Imaging and Sensing 2019 [1087811] (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; Vol. 10878). SPIE. https://doi.org/10.1117/12.2510000
Dangi, Ajay ; Agrawal, Sumit ; Tiwari, Sudhanshu ; Jadhav, Shubham ; Cheng, Christopher ; Datta, Gaurav Ramesh ; Trolier-McKinstry, Susan E. ; Pratap, Rudra ; Kothapalli, Sri-Rajasekhar. / Ring PMUT array based miniaturized photoacoustic endoscopy device. Photons Plus Ultrasound: Imaging and Sensing 2019. editor / Alexander A. Oraevsky ; Lihong V. Wang. SPIE, 2019. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE).
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abstract = "The first successful validation of a forward-looking Piezoelectric Micromachined Ultrasound Transducer (PMUT) ring array designed for photoacoustic endoscopic imaging applications is presented. PMUT ring arrays were fabricated with a 0.5 mm inner diameter, to allow insertion of an optical fiber for light delivery, and ∼2.5 mm overall outer diameter. Each ring array consisted of 6 elements, with a total of 102 PMUT cells, or 17 cells per element. Each PMUT cell has a 100 μm diameter multi-layered diaphragm having a ∼700 nm thick c-axis oriented aluminium nitride (AlN) thin film as the piezoelectric layer over a Si (handle layer) / SiO2 (1 μm) / Si (10 μm) / SiO2 (100 nm) / TiO2 (40 nm) / Pt (150 nm) substrate to act as an ultrasound receive element. The resonant frequency was ∼ 6 MHz in water. The output end of an optical fiber, coupled to a pulsed laser diode (PLD), was fitted with a 2.5 mm ferrule. The PMUT ring array was concentrically mounted on the ferrule to obtain a miniaturized endoscopic PAI device. The observed photoacoustic bandwidth was ∼75{\%}, and a strong photoacoustic signal of ∼13 mV peak-to-peak output was observed from a light absorbing target kept 5 mm away from the PMUT array. 2D and 3D photoacoustic images of the targets were obtained via raster scanning of the phantom sample. In the future, the functionality of the PMUT ring array will be enhanced through multichannel acquisition to obtain variable acoustic focus and limited view photoacoustic images in real time.",
author = "Ajay Dangi and Sumit Agrawal and Sudhanshu Tiwari and Shubham Jadhav and Christopher Cheng and Datta, {Gaurav Ramesh} and Trolier-McKinstry, {Susan E.} and Rudra Pratap and Sri-Rajasekhar Kothapalli",
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Dangi, A, Agrawal, S, Tiwari, S, Jadhav, S, Cheng, C, Datta, GR, Trolier-McKinstry, SE, Pratap, R & Kothapalli, S-R 2019, Ring PMUT array based miniaturized photoacoustic endoscopy device. in AA Oraevsky & LV Wang (eds), Photons Plus Ultrasound: Imaging and Sensing 2019., 1087811, Progress in Biomedical Optics and Imaging - Proceedings of SPIE, vol. 10878, SPIE, Photons Plus Ultrasound: Imaging and Sensing 2019, San Francisco, United States, 2/3/19. https://doi.org/10.1117/12.2510000

Ring PMUT array based miniaturized photoacoustic endoscopy device. / Dangi, Ajay; Agrawal, Sumit; Tiwari, Sudhanshu; Jadhav, Shubham; Cheng, Christopher; Datta, Gaurav Ramesh; Trolier-McKinstry, Susan E.; Pratap, Rudra; Kothapalli, Sri-Rajasekhar.

Photons Plus Ultrasound: Imaging and Sensing 2019. ed. / Alexander A. Oraevsky; Lihong V. Wang. SPIE, 2019. 1087811 (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; Vol. 10878).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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N2 - The first successful validation of a forward-looking Piezoelectric Micromachined Ultrasound Transducer (PMUT) ring array designed for photoacoustic endoscopic imaging applications is presented. PMUT ring arrays were fabricated with a 0.5 mm inner diameter, to allow insertion of an optical fiber for light delivery, and ∼2.5 mm overall outer diameter. Each ring array consisted of 6 elements, with a total of 102 PMUT cells, or 17 cells per element. Each PMUT cell has a 100 μm diameter multi-layered diaphragm having a ∼700 nm thick c-axis oriented aluminium nitride (AlN) thin film as the piezoelectric layer over a Si (handle layer) / SiO2 (1 μm) / Si (10 μm) / SiO2 (100 nm) / TiO2 (40 nm) / Pt (150 nm) substrate to act as an ultrasound receive element. The resonant frequency was ∼ 6 MHz in water. The output end of an optical fiber, coupled to a pulsed laser diode (PLD), was fitted with a 2.5 mm ferrule. The PMUT ring array was concentrically mounted on the ferrule to obtain a miniaturized endoscopic PAI device. The observed photoacoustic bandwidth was ∼75%, and a strong photoacoustic signal of ∼13 mV peak-to-peak output was observed from a light absorbing target kept 5 mm away from the PMUT array. 2D and 3D photoacoustic images of the targets were obtained via raster scanning of the phantom sample. In the future, the functionality of the PMUT ring array will be enhanced through multichannel acquisition to obtain variable acoustic focus and limited view photoacoustic images in real time.

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Dangi A, Agrawal S, Tiwari S, Jadhav S, Cheng C, Datta GR et al. Ring PMUT array based miniaturized photoacoustic endoscopy device. In Oraevsky AA, Wang LV, editors, Photons Plus Ultrasound: Imaging and Sensing 2019. SPIE. 2019. 1087811. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE). https://doi.org/10.1117/12.2510000