Role of processing parameters on morphology, resistance and composition of laser fired contacts

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Laser processing is a single step, attractive alternative to current multi-step formation of ohmic contacts between an aluminum metallization layer and a silicon substrate in solar cell devices. However, small changes in laser parameters such as pulse duration, power density and laser wavelength can result in significant differences in the contact geometry and electrical properties. Here, the effects of power density and pulse duration on the morphology, resistance and surface concentration of laser fired contacts (LFCs) are examined experimentally. The minimum fluence threshold for forming a contact with measureable resistance through the 100nm SiO2 layer is determined to be 8 J/cm2. In addition, when forming the contact, an outer rim region accumulates on the surface that is comprised of aluminum and silicon. As a result, the entire contact is actually governed by the size of an inner crater region plus this outer rim material, which is in contrast to results reported in the literature for nanosecond pulse durations. These results are in good agreement with independent results reported in the literature for LFCs processed on wafers with substantially different base resistivity and using significantly different processing parameters.

Original languageEnglish (US)
Title of host publicationLaser Material Processing for Solar Energy Devices II
Volume8826
DOIs
StatePublished - 2013
EventLaser Material Processing for Solar Energy Devices II - San Diego, CA, United States
Duration: Aug 28 2013Aug 29 2013

Other

OtherLaser Material Processing for Solar Energy Devices II
CountryUnited States
CitySan Diego, CA
Period8/28/138/29/13

Fingerprint

Contact
Laser
Lasers
Processing
Chemical analysis
pulse duration
lasers
Silicon
rims
Aluminum
radiant flux density
aluminum
Ohmic contacts
Contact Geometry
Laser Processing
silicon
Metallizing
craters
SiO2
Electrical Properties

All Science Journal Classification (ASJC) codes

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

@inproceedings{8060122d1e8442689b24e45ac7682609,
title = "Role of processing parameters on morphology, resistance and composition of laser fired contacts",
abstract = "Laser processing is a single step, attractive alternative to current multi-step formation of ohmic contacts between an aluminum metallization layer and a silicon substrate in solar cell devices. However, small changes in laser parameters such as pulse duration, power density and laser wavelength can result in significant differences in the contact geometry and electrical properties. Here, the effects of power density and pulse duration on the morphology, resistance and surface concentration of laser fired contacts (LFCs) are examined experimentally. The minimum fluence threshold for forming a contact with measureable resistance through the 100nm SiO2 layer is determined to be 8 J/cm2. In addition, when forming the contact, an outer rim region accumulates on the surface that is comprised of aluminum and silicon. As a result, the entire contact is actually governed by the size of an inner crater region plus this outer rim material, which is in contrast to results reported in the literature for nanosecond pulse durations. These results are in good agreement with independent results reported in the literature for LFCs processed on wafers with substantially different base resistivity and using significantly different processing parameters.",
author = "A. Raghavan and Todd Palmer and A. Domask and Mohney, {Suzanne E.} and Reutzel, {Edward William} and Tarasankar Debroy",
year = "2013",
doi = "10.1117/12.2023978",
language = "English (US)",
isbn = "9780819496768",
volume = "8826",
booktitle = "Laser Material Processing for Solar Energy Devices II",

}

Raghavan, A, Palmer, T, Domask, A, Mohney, SE, Reutzel, EW & Debroy, T 2013, Role of processing parameters on morphology, resistance and composition of laser fired contacts. in Laser Material Processing for Solar Energy Devices II. vol. 8826, 882606, Laser Material Processing for Solar Energy Devices II, San Diego, CA, United States, 8/28/13. https://doi.org/10.1117/12.2023978

Role of processing parameters on morphology, resistance and composition of laser fired contacts. / Raghavan, A.; Palmer, Todd; Domask, A.; Mohney, Suzanne E.; Reutzel, Edward William; Debroy, Tarasankar.

Laser Material Processing for Solar Energy Devices II. Vol. 8826 2013. 882606.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Role of processing parameters on morphology, resistance and composition of laser fired contacts

AU - Raghavan, A.

AU - Palmer, Todd

AU - Domask, A.

AU - Mohney, Suzanne E.

AU - Reutzel, Edward William

AU - Debroy, Tarasankar

PY - 2013

Y1 - 2013

N2 - Laser processing is a single step, attractive alternative to current multi-step formation of ohmic contacts between an aluminum metallization layer and a silicon substrate in solar cell devices. However, small changes in laser parameters such as pulse duration, power density and laser wavelength can result in significant differences in the contact geometry and electrical properties. Here, the effects of power density and pulse duration on the morphology, resistance and surface concentration of laser fired contacts (LFCs) are examined experimentally. The minimum fluence threshold for forming a contact with measureable resistance through the 100nm SiO2 layer is determined to be 8 J/cm2. In addition, when forming the contact, an outer rim region accumulates on the surface that is comprised of aluminum and silicon. As a result, the entire contact is actually governed by the size of an inner crater region plus this outer rim material, which is in contrast to results reported in the literature for nanosecond pulse durations. These results are in good agreement with independent results reported in the literature for LFCs processed on wafers with substantially different base resistivity and using significantly different processing parameters.

AB - Laser processing is a single step, attractive alternative to current multi-step formation of ohmic contacts between an aluminum metallization layer and a silicon substrate in solar cell devices. However, small changes in laser parameters such as pulse duration, power density and laser wavelength can result in significant differences in the contact geometry and electrical properties. Here, the effects of power density and pulse duration on the morphology, resistance and surface concentration of laser fired contacts (LFCs) are examined experimentally. The minimum fluence threshold for forming a contact with measureable resistance through the 100nm SiO2 layer is determined to be 8 J/cm2. In addition, when forming the contact, an outer rim region accumulates on the surface that is comprised of aluminum and silicon. As a result, the entire contact is actually governed by the size of an inner crater region plus this outer rim material, which is in contrast to results reported in the literature for nanosecond pulse durations. These results are in good agreement with independent results reported in the literature for LFCs processed on wafers with substantially different base resistivity and using significantly different processing parameters.

UR - http://www.scopus.com/inward/record.url?scp=84886702711&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84886702711&partnerID=8YFLogxK

U2 - 10.1117/12.2023978

DO - 10.1117/12.2023978

M3 - Conference contribution

SN - 9780819496768

VL - 8826

BT - Laser Material Processing for Solar Energy Devices II

ER -