Room temperature infrared imaging array fabricated using heterogeneous integration methods

Marcelo B. Pisani, Kailiang Ren, Ping Kao, Srinivas A. Tadigadapa

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This paper presents the design, fabrication, and characterization of temperature sensitive quartz resonators fabricated using heterogeneous integration methods for realizing high-density, thermal conductance fluctuation limited infrared imaging arrays operating at room temperature. High frequency (241 MHz) micromachined resonators from Y-cut quartz crystal cuts were fabricated with a temperature sensitivity of 22.16 kHz/°C. Infrared measurements on the resonator pixel resulted in a noise equivalent power (NEP) of 3.90 nW/Hz1/2, a detectivity D* of 9.17x107 cm Hz1/2/W, and noise equivalent temperature difference (NETD) of 46.6 mK in the 8-14 μm wavelength range. The thermal frequency response of the resonator was determined to be faster than 33 Hz, demonstrating its applicability as a video-rate uncooled infrared sensor.

Original languageEnglish (US)
Pages (from-to)952-955
Number of pages4
JournalProcedia Engineering
Volume5
DOIs
StatePublished - Jan 1 2010

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Infrared imaging
Resonators
Quartz
Infrared radiation
Temperature
Frequency response
Pixels
Fabrication
Wavelength
Crystals
Sensors
Hot Temperature

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Pisani, Marcelo B. ; Ren, Kailiang ; Kao, Ping ; Tadigadapa, Srinivas A. / Room temperature infrared imaging array fabricated using heterogeneous integration methods. In: Procedia Engineering. 2010 ; Vol. 5. pp. 952-955.
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Room temperature infrared imaging array fabricated using heterogeneous integration methods. / Pisani, Marcelo B.; Ren, Kailiang; Kao, Ping; Tadigadapa, Srinivas A.

In: Procedia Engineering, Vol. 5, 01.01.2010, p. 952-955.

Research output: Contribution to journalArticle

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