This paper presents the design, fabrication, and characterization of temperature sensitive quartz resonators fabricated using heterogeneous integration methods for realizing high-density, thermal conductance fluctuation limited infrared imaging arrays operating at room temperature. High frequency (241 MHz) micromachined resonators from Y-cut quartz crystal cuts were fabricated with a temperature sensitivity of 22.16 kHz/°C. Infrared measurements on the resonator pixel resulted in a noise equivalent power (NEP) of 3.90 nW/Hz1/2, a detectivity D* of 9.17x107 cm Hz1/2/W, and noise equivalent temperature difference (NETD) of 46.6 mK in the 8-14 μm wavelength range. The thermal frequency response of the resonator was determined to be faster than 33 Hz, demonstrating its applicability as a video-rate uncooled infrared sensor.
All Science Journal Classification (ASJC) codes