SAMS and protein adsorption studies for the calibration of miniaturized quartz crystal microbalance arrays

Ping Kao, Abhijat Goyal, David Allara, Srinivas A. Tadigadapa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

We report the design and fabrication of a micromachined quartz crystal balance (QCM) array for self assembled monolayers (SAMs) and protein adsorption studies. The microQCM was fabricated using recently developed inductively coupled plasma etching process for quartz to realize resonators with 60 μm thickness and electrode diameters of 0.5 mm. The reduction in the thickness and lateral pixel size has resulted in a sensitivity improvement by factor of 1364 over a commercially available macro-sized QCM. In both rigid and viscoelastic film adsorption limits, we find the microQCM to exhibit three times greater sensitivity than the predicted value when operated at the third overtone. These results show that the micromachined QCM in array format is a very sensitive gravimetric sensor capable of mass resolutions into the femtograms range.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages2311-2314
Number of pages4
DOIs
StatePublished - Dec 1 2007
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: Jun 10 2007Jun 14 2007

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period6/10/076/14/07

Fingerprint

Quartz crystal microbalances
Quartz
Calibration
Proteins
Adsorption
Plasma etching
Inductively coupled plasma
Self assembled monolayers
Macros
Resonators
Pixels
Fabrication
Crystals
Electrodes
Sensors

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Kao, P., Goyal, A., Allara, D., & Tadigadapa, S. A. (2007). SAMS and protein adsorption studies for the calibration of miniaturized quartz crystal microbalance arrays. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 2311-2314). [4300632] https://doi.org/10.1109/SENSOR.2007.4300632
Kao, Ping ; Goyal, Abhijat ; Allara, David ; Tadigadapa, Srinivas A. / SAMS and protein adsorption studies for the calibration of miniaturized quartz crystal microbalance arrays. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. pp. 2311-2314
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abstract = "We report the design and fabrication of a micromachined quartz crystal balance (QCM) array for self assembled monolayers (SAMs) and protein adsorption studies. The microQCM was fabricated using recently developed inductively coupled plasma etching process for quartz to realize resonators with 60 μm thickness and electrode diameters of 0.5 mm. The reduction in the thickness and lateral pixel size has resulted in a sensitivity improvement by factor of 1364 over a commercially available macro-sized QCM. In both rigid and viscoelastic film adsorption limits, we find the microQCM to exhibit three times greater sensitivity than the predicted value when operated at the third overtone. These results show that the micromachined QCM in array format is a very sensitive gravimetric sensor capable of mass resolutions into the femtograms range.",
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Kao, P, Goyal, A, Allara, D & Tadigadapa, SA 2007, SAMS and protein adsorption studies for the calibration of miniaturized quartz crystal microbalance arrays. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300632, pp. 2311-2314, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 6/10/07. https://doi.org/10.1109/SENSOR.2007.4300632

SAMS and protein adsorption studies for the calibration of miniaturized quartz crystal microbalance arrays. / Kao, Ping; Goyal, Abhijat; Allara, David; Tadigadapa, Srinivas A.

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 2311-2314 4300632.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Kao P, Goyal A, Allara D, Tadigadapa SA. SAMS and protein adsorption studies for the calibration of miniaturized quartz crystal microbalance arrays. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 2311-2314. 4300632 https://doi.org/10.1109/SENSOR.2007.4300632