Science and technology of high dielectric constant thin films and materials integration for application to high frequency devices

O. Auciello, S. Saha, D. Y. Kaufman, S. K. Streiffer, W. Fan, B. Kabius, J. Im, P. Baumann

Research output: Contribution to journalReview article

44 Citations (Scopus)

Abstract

Thin films of Ba 1-xSr xTi 1+yO 3+z (BST), were fabricated using both by RF-magnetron sputtering and MOCVD to demonstrate application to high frequency devices. Precise control of composition and microstructure is critical for the production of (Ba xSr 1-xTi 1+yO 3+z (BST) dielectric thin films with the large dependence of permittivity on electric field, low losses, and high electrical breakdown fields that are required for successful integration of BST into tunable high frequency devices. Here we review results on composition-microstructure-electrical property relationships of polycrystalline BST films produced by magnetron sputter deposition that are appropriate for microwave devices such as phase shifters. BST films with a multilayer structure were also developed with different Ti-elemental ratio in each layer to minimize losses and leakage current. Interfacial contamination from C and H species was studied and implications on electrical properties are highlighted. Finally, York's group at the University of California-Santa Barbara successfully integrated our BST films onto phase shifter arrays. The results show potential of BST films in such applications. Results from initial work on the integration of Cu-electrodes with BST films are also presented.

Original languageEnglish (US)
Pages (from-to)119-131
Number of pages13
JournalJournal of Electroceramics
Volume12
Issue number1-2
DOIs
StatePublished - Jan 1 2004

Fingerprint

Permittivity
permittivity
Thin films
thin films
Phase shifters
Electric properties
electrical properties
Microwave devices
microstructure
Sputter deposition
Microstructure
Dielectric films
Metallorganic chemical vapor deposition
Chemical analysis
electrical faults
Leakage currents
Magnetron sputtering
laminates
metalorganic chemical vapor deposition
magnetron sputtering

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Mechanics of Materials
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Auciello, O. ; Saha, S. ; Kaufman, D. Y. ; Streiffer, S. K. ; Fan, W. ; Kabius, B. ; Im, J. ; Baumann, P. / Science and technology of high dielectric constant thin films and materials integration for application to high frequency devices. In: Journal of Electroceramics. 2004 ; Vol. 12, No. 1-2. pp. 119-131.
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Science and technology of high dielectric constant thin films and materials integration for application to high frequency devices. / Auciello, O.; Saha, S.; Kaufman, D. Y.; Streiffer, S. K.; Fan, W.; Kabius, B.; Im, J.; Baumann, P.

In: Journal of Electroceramics, Vol. 12, No. 1-2, 01.01.2004, p. 119-131.

Research output: Contribution to journalReview article

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AU - Auciello, O.

AU - Saha, S.

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