Science and technology of piezoelectric/diamond hybrid heterostructures for high performance MEMS/NEMS devices

Orlando Auciello, Anirudha Sumant, Jon Hiller, Bernd C. Kabius, Sudarsan Srinivasan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Most current micro/nanoelectromechanical systems (MEMS/NEMS) are based on silicon. However, silicon exhibits relatively poor mechanical/tribological properties, compromising applications to some devices. Diamond films with superior mechanical/tribological properties provide an excellent alternative platform material. Ultrananocrystalline diamond (UNCD®) in film form with 2-5 nm grains exhibits excellent mechanical and tribological properties for high-performance MEMS/NEMS devices. Concurrently, piezoelectric Pb(Zr xTi1-x)O3 (PZT) films provide high sensitivity/low electrical noise for sensing/high-force actuation at relatively low voltages. Therefore, integration of PZT and UNCD films provides a high-performance platform for advanced MEMS/NEMS devices. This paper describes the bases of such integration and demonstration of low voltage piezoactuated hybrid PZT/UNCD cantilevers.

Original languageEnglish (US)
Title of host publicationMicroelectromechanical Systems - Materials and Devices
Pages259-264
Number of pages6
Volume1052
StatePublished - 2008
EventMicroelectromechanical Systems - Materials and Devices - Boston, MA, United States
Duration: Nov 26 2007Nov 28 2007

Other

OtherMicroelectromechanical Systems - Materials and Devices
CountryUnited States
CityBoston, MA
Period11/26/0711/28/07

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

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