Secondary ion and neutral mass spectrometry with swift heavy ions: Organic molecules

Lars Breuer, Florian Meinerzhagen, Matthias Herder, Markus Bender, Daniel Severin, Jordan Oswald Lerach, Andreas Wucher

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The authors report on experiments regarding the electronic and nuclear sputtering of organic films. The newly built swift heavy ion induced particle emission and surface modifications setup [Meinerzhagen et al., Rev. Sci. Instrum. 87, 013903 (2016)] at the M1 Branch at the universal linear accelerator (UNILAC) beam line at GSI in Darmstadt, Germany, has been used for research on organic molecules in the electronic sputtering regime. This setup has the unique capability not only to investigate electronically sputtered ions by projectiles with kinetic energies up to several giga-electron-volt but also to detect their neutral counterparts as well by laser postionization. For this purpose, the experiment is equipped with a laser system delivering 157 nm pulses with photon energies of 7.9 eV to be utilized in single photon ionization. In addition to the investigation of sputtered ions and neutrals in the electronic sputtering regime, a comparison of typical fragments between fundamentally different sputtering mechanisms has been performed by using two different common time of flight secondary ion mass spectrometry (SIMS) instruments. The use of the different instruments offers the possibility to investigate the influence of the differing sputter processes from the linear cascade regime over collisional spikes to the thermal spike regime under high energy ion bombardment. The experiments in the collision-dominated nuclear stopping regime have been performed using 20 keV Bi+ and Bi3+ as atomic and small cluster projectiles and using 20 keV C60+ representing a medium-sized cluster. In the electronic sputtering regime, 4.8 MeV/u 197Au26+ swift heavy ions created by the UNILAC have been used as projectiles. As targets thin films of coronene on silicon substrates, a polycyclic hydrocarbon and Irganox 1010, an antioxidant well known from different studies in the SIMS community, have been utilized.

Original languageEnglish (US)
Article number03H130
JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume34
Issue number3
DOIs
StatePublished - May 1 2016

Fingerprint

Heavy Ions
Heavy ions
Mass spectrometry
Sputtering
heavy ions
mass spectroscopy
sputtering
Ions
Projectiles
Molecules
projectiles
Linear accelerators
molecules
linear accelerators
Secondary ion mass spectrometry
ions
electronics
spikes
secondary ion mass spectrometry
Cyclic Hydrocarbons

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Breuer, Lars ; Meinerzhagen, Florian ; Herder, Matthias ; Bender, Markus ; Severin, Daniel ; Lerach, Jordan Oswald ; Wucher, Andreas. / Secondary ion and neutral mass spectrometry with swift heavy ions : Organic molecules. In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics. 2016 ; Vol. 34, No. 3.
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Secondary ion and neutral mass spectrometry with swift heavy ions : Organic molecules. / Breuer, Lars; Meinerzhagen, Florian; Herder, Matthias; Bender, Markus; Severin, Daniel; Lerach, Jordan Oswald; Wucher, Andreas.

In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, Vol. 34, No. 3, 03H130, 01.05.2016.

Research output: Contribution to journalArticle

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