Selective growth of sculptured nanowires on microlithographic lattices

Mark W. Horn, Matthew D. Pickett, Russell Messier, Akhlesh Lakhtakia

Research output: Contribution to journalArticle

24 Scopus citations

Abstract

We have grown helicoidal nanowire assemblies on a variety of topographic substrates with regular microlithographic patterns, thereby demonstrating that sculptured thin films with transversely latticed architecture can be grown by physical vapor deposition. The transverse feature-separations are as low as 100-300 nm, and mesa regions are circular posts as small as 60 nm in diameter. The initial as well as the subsequent stages of growth on topographic substrates can be understood using simple geometric shadowing arguments.

Original languageEnglish (US)
Pages (from-to)3426-3430
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number6
DOIs
StatePublished - Nov 1 2004

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All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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