Self-alignment of patterned wafers using capillary forces at a water-air interface

Benjamin R. Martin, Donna C. Furnange, Thomas Nelson Jackson, Thomas E. Mallouk, Theresa S. Mayer

Research output: Contribution to journalArticle

32 Citations (Scopus)

Abstract

Capillary interactions at a water-air interface were used to align a two-inch glass wafer to a three-inch silicon wafer. Flat, smooth silica surfaces were patterned with gold millimeter-scale borders enclosing micrometer-scale features. The gold features were rendered hydrophobic through the use of self-assembled monolayers, the silica was wetted with water, and the wafers were pressed together. The assembly snapped into alignment based upon the minimization of the curvature of the meniscus formed at the water-air interface. The accuracy of this alignment was better than one micrometer. Gravitational energy was used to systematically study the alignment force as a function of pattern parameters. These data can be modeled by interfacial energy theory. These experiments identify a clear set of conditions necessary for the use of this technique for high-precision alignment.

Original languageEnglish (US)
Pages (from-to)381-386
Number of pages6
JournalAdvanced Functional Materials
Volume11
Issue number5
DOIs
StatePublished - Oct 2001

Fingerprint

self alignment
alignment
wafers
Water
air
Air
Silicon Dioxide
Gold
water
micrometers
Silica
gold
silicon dioxide
interfacial energy
menisci
Self assembled monolayers
Silicon wafers
borders
Interfacial energy
assembly

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Materials Science(all)
  • Condensed Matter Physics
  • Physics and Astronomy (miscellaneous)

Cite this

Martin, Benjamin R. ; Furnange, Donna C. ; Jackson, Thomas Nelson ; Mallouk, Thomas E. ; Mayer, Theresa S. / Self-alignment of patterned wafers using capillary forces at a water-air interface. In: Advanced Functional Materials. 2001 ; Vol. 11, No. 5. pp. 381-386.
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Self-alignment of patterned wafers using capillary forces at a water-air interface. / Martin, Benjamin R.; Furnange, Donna C.; Jackson, Thomas Nelson; Mallouk, Thomas E.; Mayer, Theresa S.

In: Advanced Functional Materials, Vol. 11, No. 5, 10.2001, p. 381-386.

Research output: Contribution to journalArticle

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