SEM studies of nonuniformieties and defects in GaN and AlGaN epitaxial films

A. V. Govorkov, A. Y. Polyakov, N. B. Smirnov, Joan Marie Redwing, M. Skowronski, M. Shin

Research output: Contribution to journalArticle

1 Scopus citations
Original languageEnglish (US)
Pages (from-to)471-476
Number of pages6
JournalIzvestiya Akademii Nauk. Ser. Fizicheskaya
Volume62
Issue number3
StatePublished - Dec 1 1998

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Govorkov, A. V., Polyakov, A. Y., Smirnov, N. B., Redwing, J. M., Skowronski, M., & Shin, M. (1998). SEM studies of nonuniformieties and defects in GaN and AlGaN epitaxial films. Izvestiya Akademii Nauk. Ser. Fizicheskaya, 62(3), 471-476.