Sensing characteristics of in-plane polarized lead zirconate titanate thin films

Baomin Xu, Ronald G. Polcawich, Susan Trolier-Mckinstry, Yaohong Ye, L. Eric Cross, Jonathan J. Bernstein, Raanan Miller

Research output: Contribution to journalArticlepeer-review

48 Scopus citations

Abstract

The sensing characteristics of in-plane polarized lead zirconate titanate (PZT) thin films were studied and compared with the through-thickness polarized PZT films. The in-plane polarized PZT films were deposited on ZrO2-passivated silicon substrates and had interdigitated electrode systems on the top surface; hence, they can be polarized in the film plane. This in-plane polarization configuration separates the electrode spacing and film thickness as independent variables; thus, the voltage sensitivity can be increased by using wider electrode spacing even for fixed film thickness. The results show that for films with a thickness of 1 μm the voltage sensitivity of in-plane polarized PZT films can be more than 20 times higher than that of the conventional, through-thickness polarized PZT films which were deposited on Pt-buffered silicon substrates.

Original languageEnglish (US)
Pages (from-to)4180-4182
Number of pages3
JournalApplied Physics Letters
Volume75
Issue number26
DOIs
StatePublished - Dec 1 1999

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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