Sensors for material process monitoring and control

Bernhard R. Tittmann, C. Eric Yen, C. A. Moose

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This report briefly reviews recent progress in the use of sensors to monitor critical parameters during material processing. The techniques focus on the use of waveguides providing an ultrasonic link between the detector and the part in the furnace.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsAntoni Sliwinski, Piotr Kwiek, B. Linde, A. Markiewicz
Pages263-266
Number of pages4
StatePublished - Dec 1 1995
EventAcousto-Optics and Applications II - Gdansk-Jurata, Pol
Duration: May 22 1995May 26 1995

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2643
ISSN (Print)0277-786X

Other

OtherAcousto-Optics and Applications II
CityGdansk-Jurata, Pol
Period5/22/955/26/95

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Tittmann, B. R., Yen, C. E., & Moose, C. A. (1995). Sensors for material process monitoring and control. In A. Sliwinski, P. Kwiek, B. Linde, & A. Markiewicz (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (pp. 263-266). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2643).