Silicone polymer chemical vapor sensors fabricated by direct polymer patterning on substrate technique (DPPOST)

Adam Huang, Victor Tak Sing Wong, Chih Ming Ho

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Soft polymeric materials have proven to provide a host of new capabilities for micro-electro-mechanical systems (MEMS). However, the direct patterning of soft polymeric materials on substrates is not as developed as those found in photolithographic technologies for MEMS. This paper demonstrates the patterning of fully aligned soft polymeric materials, such as the room temperature vulcanizing (RTV) silicone, on glass or silicon substrates using the direct polymer patterning on substrate technique (DPPOST). The patterned polymer line width of ∼10 μm has been achieved using this technique. By utilizing this newly developed fabrication technology, single and array elements of silicone-carbon black polymeric chemical vapor sensor has been fabricated and tested for the intended application in electronic nose systems. The sensors have been shown to be sensitive to common solvents such as acetone, methanol, ethanol and 2-propanol. Simple noise measurement experiments also show the insensitivity of the sensor noise to the chemical vapor concentrations.

Original languageEnglish (US)
Pages (from-to)2-10
Number of pages9
JournalSensors and Actuators, B: Chemical
Volume116
Issue number1-2
DOIs
StatePublished - Jul 28 2006

Fingerprint

silicones
Silicones
Polymers
Vapors
vapors
sensors
vulcanizing
Sensors
polymers
Substrates
Soot
2-Propanol
Silicon
noise measurement
Acetone
Chemical elements
Linewidth
acetone
Methanol
ethyl alcohol

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

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Silicone polymer chemical vapor sensors fabricated by direct polymer patterning on substrate technique (DPPOST). / Huang, Adam; Wong, Victor Tak Sing; Ho, Chih Ming.

In: Sensors and Actuators, B: Chemical, Vol. 116, No. 1-2, 28.07.2006, p. 2-10.

Research output: Contribution to journalArticle

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