Single-crystal superconducting nanowires of NbSe2 fabricated by reactive plasma etching

Shaun A. Mills, Neal E. Staley, Jacob J. Wisser, Chenyi Shen, Zhuan Xu, Ying Liu

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6 Scopus citations

Abstract

We present the preparation and measurements of nanowires of single-crystal NbSe2. These nanowires were prepared on ultrathin (a10nm) flakes of NbSe2 mechanically exfoliated from a bulk single crystal using a process combining electron beam lithography and reactive plasma etching. The electrical contacts to the nanowires were prepared using Ti/Au. Our technique, which overcomes several limitations of methods developed previously for fabricating superconducting nanowires, also allows for the preparation of complex superconducting nanostructures with a desired geometry. Current-voltage characteristics of individual superconducting single-crystal nanowires with widths down to 30nm and cross-sectional areas as low as 270 nm2 were measured.

Original languageEnglish (US)
Article number052604
JournalApplied Physics Letters
Volume104
Issue number5
DOIs
StatePublished - Feb 3 2014

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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