Smooth cubic commensurate oxides on gallium nitride

Elizabeth A. Paisley, Benjamin E. Gaddy, James M. Lebeau, Christopher T. Shelton, Michael D. Biegalski, Hans M. Christen, Mark D. Losego, Seiji Mita, Ramón Collazo, Zlatko Sitar, Douglas L. Irving, Jon-Paul Maria

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Abstract

Smooth, commensurate alloys of 〈111〉-oriented Mg 0.52Ca0.48O (MCO) thin films are demonstrated on Ga-polar, c+ [0001]-oriented GaN by surfactant-assisted molecular beam epitaxy and pulsed laser deposition. These are unique examples of coherent cubic oxide|nitride interfaces with structural and morphological perfection. Metal-insulator- semiconductor capacitor structures were fabricated on n-type GaN. A comparison of leakage current density for conventional and surfactant-assisted growth reveals a nearly 100× reduction in leakage current density for the surfactant-assisted samples. HAADF-STEM images of the MCO|GaN interface show commensurate alignment of atomic planes with minimal defects due to lattice mismatch. STEM and DFT calculations show that GaN c/2 steps create incoherent boundaries in MCO over layers which manifest as two in-plane rotations and determine consequently the density of structural defects in otherwise coherent MCO. This new understanding of interfacial steps between HCP and FCC crystals identifies the steps needed to create globally defect-free heterostructures.

Original languageEnglish (US)
Article number064101
JournalJournal of Applied Physics
Volume115
Issue number6
DOIs
Publication statusPublished - Jan 1 2014

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All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Paisley, E. A., Gaddy, B. E., Lebeau, J. M., Shelton, C. T., Biegalski, M. D., Christen, H. M., ... Maria, J-P. (2014). Smooth cubic commensurate oxides on gallium nitride. Journal of Applied Physics, 115(6), [064101]. https://doi.org/10.1063/1.4861172