Sol-gel processing of piezoelectric thin films

Isaac Robin Abothu, Yukio Ito, Patcharin Poosanaas, Sriram Kalpat, Sridhar Komarneni, Kenji Uchino

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

Lead zirconate titanate, Pb(ZrxTi1-x)O3 [PZT] rhombohedral thin films with [001] orientation were fabricated by sol-gel spin coating techniques. Using a methoxyethanol based precursor solution and rapid thermal annealing at 700°C for 30 seconds, crack free and homogeneous PZT thin films were successfully obtained. Preferred [001] oriented PZT thin films with x = 0.80 showed a remanent polarization of 28 μC/cm2 and a coercive field of 17 kV/cm.

Original languageEnglish (US)
Pages (from-to)191-195
Number of pages5
JournalFerroelectrics
Volume232
Issue number1-4
DOIs
StatePublished - Jan 1 1999

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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