Sol-gel processing of piezoelectric thin films

Isaac Robin Abothu, Yukio Ito, Patcharin Poosanaas, Sriram Kalpat, Sridhar Komarneni, Kenji Uchino

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Lead zirconate titanate, Pb(Zr x Ti 1-x )O 3 [PZT] rhombohedral thin films with [001] orientation were fabricated by sol-gel spin coating techniques. Using a methoxyethanol based precursor solution and rapid thermal annealing at 700°C for 30 seconds, crack free and homogeneous PZT thin films were successfully obtained. Preferred [001] oriented PZT thin films with x = 0.80 showed a remanent polarization of 28 μC/cm 2 and a coercive field of 17 kV/cm.

Original languageEnglish (US)
Pages (from-to)191-195
Number of pages5
JournalFerroelectrics
Volume232
Issue number1-4
DOIs
StatePublished - Jan 1 1999

Fingerprint

Sol-gels
gels
Thin films
thin films
Processing
Coating techniques
Remanence
Rapid thermal annealing
Spin coating
coating
cracks
Cracks
annealing
polarization
lead titanate zirconate

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Abothu, Isaac Robin ; Ito, Yukio ; Poosanaas, Patcharin ; Kalpat, Sriram ; Komarneni, Sridhar ; Uchino, Kenji. / Sol-gel processing of piezoelectric thin films. In: Ferroelectrics. 1999 ; Vol. 232, No. 1-4. pp. 191-195.
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Abothu, IR, Ito, Y, Poosanaas, P, Kalpat, S, Komarneni, S & Uchino, K 1999, 'Sol-gel processing of piezoelectric thin films', Ferroelectrics, vol. 232, no. 1-4, pp. 191-195. https://doi.org/10.1080/00150199908015791

Sol-gel processing of piezoelectric thin films. / Abothu, Isaac Robin; Ito, Yukio; Poosanaas, Patcharin; Kalpat, Sriram; Komarneni, Sridhar; Uchino, Kenji.

In: Ferroelectrics, Vol. 232, No. 1-4, 01.01.1999, p. 191-195.

Research output: Contribution to journalArticle

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