Sol-gel synthesis of Ba(Mg1/3Ta2/3)O3: Phase pure powder and thin films

D. Ravichandran, Richard Joseph Meyer, Jr., R. Roy, R. Guo, A. S. Bhalla, L. E. Cross

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

Phase pure Ba(Mg1/3Ta2/3)O3 (BMT) powders were prepared using Ba metal, Mg(OC2H5)2, and Ta(OC2H5)5 as metal-organic precursors. Thin films of BMT were spin coated onto Pt-coated Si (100) substrates using the prepared solution and then fired at various temperatures. The X-ray diffraction patterns show that the films crystallize to a single disordered perovskite phase on Si (100) at ∼ 600°C. Scanning electron microscopy reveals that the films 0.3 μm in thickness and approximately 0.1 μm in grain size were essentially crack-free.

Original languageEnglish (US)
Pages (from-to)817-825
Number of pages9
JournalMaterials Research Bulletin
Volume31
Issue number7
DOIs
StatePublished - Jan 1 1996

Fingerprint

Powders
Sol-gels
Metals
gels
Thin films
synthesis
thin films
Perovskite
metals
Diffraction patterns
diffraction patterns
cracks
grain size
Cracks
X ray diffraction
Scanning electron microscopy
scanning electron microscopy
Substrates
x rays
Temperature

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Ravichandran, D. ; Meyer, Jr., Richard Joseph ; Roy, R. ; Guo, R. ; Bhalla, A. S. ; Cross, L. E. / Sol-gel synthesis of Ba(Mg1/3Ta2/3)O3 : Phase pure powder and thin films. In: Materials Research Bulletin. 1996 ; Vol. 31, No. 7. pp. 817-825.
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Sol-gel synthesis of Ba(Mg1/3Ta2/3)O3 : Phase pure powder and thin films. / Ravichandran, D.; Meyer, Jr., Richard Joseph; Roy, R.; Guo, R.; Bhalla, A. S.; Cross, L. E.

In: Materials Research Bulletin, Vol. 31, No. 7, 01.01.1996, p. 817-825.

Research output: Contribution to journalArticle

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AB - Phase pure Ba(Mg1/3Ta2/3)O3 (BMT) powders were prepared using Ba metal, Mg(OC2H5)2, and Ta(OC2H5)5 as metal-organic precursors. Thin films of BMT were spin coated onto Pt-coated Si (100) substrates using the prepared solution and then fired at various temperatures. The X-ray diffraction patterns show that the films crystallize to a single disordered perovskite phase on Si (100) at ∼ 600°C. Scanning electron microscopy reveals that the films 0.3 μm in thickness and approximately 0.1 μm in grain size were essentially crack-free.

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