Sol-gel synthesis of Ba(Mg1/3Ta2/3)O3: Phase pure powder and thin films

D. Ravichandran, R. Meyer, R. Roy, R. Guo, A. S. Bhalla, L. E. Cross

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Abstract

Phase pure Ba(Mg1/3Ta2/3)O3 (BMT) powders were prepared using Ba metal, Mg(OC2H5)2, and Ta(OC2H5)5 as metal-organic precursors. Thin films of BMT were spin coated onto Pt-coated Si (100) substrates using the prepared solution and then fired at various temperatures. The X-ray diffraction patterns show that the films crystallize to a single disordered perovskite phase on Si (100) at ∼ 600°C. Scanning electron microscopy reveals that the films 0.3 μm in thickness and approximately 0.1 μm in grain size were essentially crack-free.

Original languageEnglish (US)
Pages (from-to)817-825
Number of pages9
JournalMaterials Research Bulletin
Volume31
Issue number7
DOIs
StatePublished - Jul 1996

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All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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