Phase pure Ba(Mg1/3Ta2/3)O3 (BMT) powders were prepared using Ba metal, Mg(OC2H5)2, and Ta(OC2H5)5 as metal-organic precursors. Thin films of BMT were spin coated onto Pt-coated Si (100) substrates using the prepared solution and then fired at various temperatures. The X-ray diffraction patterns show that the films crystallize to a single disordered perovskite phase on Si (100) at ∼ 600°C. Scanning electron microscopy reveals that the films 0.3 μm in thickness and approximately 0.1 μm in grain size were essentially crack-free.
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering