Sol—Gel Fabrication of Pb(Zr0.52 Ti0.48)O3 Thin Films Using Lead Acetylacetonate as the Lead Source

Ulagaraj Selvaraj, Keith Brooks, Alamanda V. Prasadarao, Sridhar Komarneni, Rustum Roy, L. Eric Cross

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41 Scopus citations


Lead zirconium titanate (PZT) thin films of the morphotropic phase boundary composition [Pb(Zr0.52Ti0.43)O3] were deposited on platinum‐coated silicon by a modified sol‐gel process using lead acetylacetonate as the lead source. The precursor solution for spin coating was prepared from lead acetylacetonate, zirconium n‐butoxide, and titanium isopropoxide. The use of lead acetylacetonate instead of the widely used lead acetate trihydrate provided more stability to the PZT precursor solution. Films annealed at 700°C for 12 min formed well‐crystallized perovskite phase of Pb(Zr0.52Ti0.48)O3. Microstructures of these films indicated the presence of submicrometer grains (0.1 to 0.2 μm). The dielectric constant and loss values of these films measured at 10 kHz were approximately 1200 and 0.04, respectively, while the remanent polarization and coercive field were ∼ 13 μC/cm2 and ∼ 35 kV/cm. Aging of the solution had almost no effect on the dielectric and ferroelectric properties of these films.

Original languageEnglish (US)
Pages (from-to)1441-1444
Number of pages4
JournalJournal of the American Ceramic Society
Issue number6
StatePublished - Jun 1993

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry


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