Solid state MOSFET based hydrophone

B. Zhu, Jianhua Zhang, V. K. Varadan, V. V. Varandan

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

In this paper, we present the design and fabrication of MEMS hydrophones on a silicon wafer using standard NMOS process technology. The effects of two MOSFET amplifiers with different W/L ratios on the hydrophone performance are investigated. A piezoelectric polymer, polyvinylidene difluoride (PVDF), is employed as the sensing material. Acoustic impedance possessed by this piezoelectric material provides a reasonable match to that of water, which makes it very attractive for underwater applications. Measurements of the hydrophone devices were carried out in a pulse tube with a frequency range of 4-10 KHz. The results reveal that the hydrophone comprising a MOSFET with larger W/L ratio provides better sensitivity.

Original languageEnglish (US)
Pages (from-to)368-377
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3990
StatePublished - Jan 1 2000

Fingerprint

Hydrophones
MOSFET
hydrophones
field effect transistors
solid state
Piezoelectric Material
Micro-electro-mechanical Systems
Wafer
Impedance
Fabrication
Tube
Silicon
Acoustics
Sensing
Polymers
Water
difluorides
Acoustic impedance
acoustic impedance
Piezoelectric materials

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Zhu, B. ; Zhang, Jianhua ; Varadan, V. K. ; Varandan, V. V. / Solid state MOSFET based hydrophone. In: Proceedings of SPIE - The International Society for Optical Engineering. 2000 ; Vol. 3990. pp. 368-377.
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Solid state MOSFET based hydrophone. / Zhu, B.; Zhang, Jianhua; Varadan, V. K.; Varandan, V. V.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3990, 01.01.2000, p. 368-377.

Research output: Contribution to journalConference article

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AU - Zhu, B.

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AU - Varadan, V. K.

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