The electrical conduction in thin-film diamond synthesized by microwave plasma enhanced chemical vapor deposition has been studied with metal-diamond-silicon metal-insulator-semiconductor structures. Measurements over a wide temperature range provide evidence for space-charge-limited current in the presence of traps. An exponential distribution of traps with a peak value of the order of 3×1020 cm-3 eV-1 has been deduced from the current-voltage-temperature data.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)