FingerprintDive into the research topics of 'Stability of ZrO 2 layers on Si (001) during high-temperature anneals under reduced oxygen partial pressures'. Together they form a unique fingerprint.
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Susanne Stemmer, Zhiqiang Chen, Ralf Keding, Jon Paul Maria, Dwi Wicaksana, Angus I. Kingon
Research output: Contribution to journal › Article › peer-review