Statistical process adjustment: A brief retrospective, current status, and some opportunities for further work

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Abstract

Industrial statisticians frequently face problems in their practice where adjustment of a manufacturing process is necessary. In this paper, a view of the origins and recent work in the area of statistical process adjustment (SPA) is provided. A discussion of some topics open for further research is also given including new problems in semiconductor manufacturing process control. The goal of the paper is to help display the SPA field as a research area with its own identity and content, and promote further interest in its development and application in the industry.

Original languageEnglish (US)
Pages (from-to)309-326
Number of pages18
JournalStatistica Neerlandica
Volume60
Issue number3
DOIs
StatePublished - Aug 2006

All Science Journal Classification (ASJC) codes

  • Statistics and Probability
  • Statistics, Probability and Uncertainty

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