Abstract
Industrial statisticians frequently face problems in their practice where adjustment of a manufacturing process is necessary. In this paper, a view of the origins and recent work in the area of statistical process adjustment (SPA) is provided. A discussion of some topics open for further research is also given including new problems in semiconductor manufacturing process control. The goal of the paper is to help display the SPA field as a research area with its own identity and content, and promote further interest in its development and application in the industry.
Original language | English (US) |
---|---|
Pages (from-to) | 309-326 |
Number of pages | 18 |
Journal | Statistica Neerlandica |
Volume | 60 |
Issue number | 3 |
DOIs | |
State | Published - Aug 1 2006 |
All Science Journal Classification (ASJC) codes
- Statistics and Probability
- Statistics, Probability and Uncertainty