Statistical process adjustment: A brief retrospective, current status, and some opportunities for further work

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

Industrial statisticians frequently face problems in their practice where adjustment of a manufacturing process is necessary. In this paper, a view of the origins and recent work in the area of statistical process adjustment (SPA) is provided. A discussion of some topics open for further research is also given including new problems in semiconductor manufacturing process control. The goal of the paper is to help display the SPA field as a research area with its own identity and content, and promote further interest in its development and application in the industry.

Original languageEnglish (US)
Pages (from-to)309-326
Number of pages18
JournalStatistica Neerlandica
Volume60
Issue number3
DOIs
StatePublished - Aug 1 2006

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Adjustment
Semiconductor Manufacturing
Process Control
Manufacturing
Industry
Necessary
Manufacturing process
Adjustment process
Semiconductor manufacturing

All Science Journal Classification (ASJC) codes

  • Statistics and Probability
  • Statistics, Probability and Uncertainty

Cite this

@article{375d0be15a794f6f80f533da8601460e,
title = "Statistical process adjustment: A brief retrospective, current status, and some opportunities for further work",
abstract = "Industrial statisticians frequently face problems in their practice where adjustment of a manufacturing process is necessary. In this paper, a view of the origins and recent work in the area of statistical process adjustment (SPA) is provided. A discussion of some topics open for further research is also given including new problems in semiconductor manufacturing process control. The goal of the paper is to help display the SPA field as a research area with its own identity and content, and promote further interest in its development and application in the industry.",
author = "{Del Castillo}, E.",
year = "2006",
month = "8",
day = "1",
doi = "10.1111/j.1467-9574.2006.00328.x",
language = "English (US)",
volume = "60",
pages = "309--326",
journal = "Statistica Neerlandica",
issn = "0039-0402",
publisher = "Wiley-Blackwell",
number = "3",

}

Statistical process adjustment : A brief retrospective, current status, and some opportunities for further work. / Del Castillo, E.

In: Statistica Neerlandica, Vol. 60, No. 3, 01.08.2006, p. 309-326.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Statistical process adjustment

T2 - A brief retrospective, current status, and some opportunities for further work

AU - Del Castillo, E.

PY - 2006/8/1

Y1 - 2006/8/1

N2 - Industrial statisticians frequently face problems in their practice where adjustment of a manufacturing process is necessary. In this paper, a view of the origins and recent work in the area of statistical process adjustment (SPA) is provided. A discussion of some topics open for further research is also given including new problems in semiconductor manufacturing process control. The goal of the paper is to help display the SPA field as a research area with its own identity and content, and promote further interest in its development and application in the industry.

AB - Industrial statisticians frequently face problems in their practice where adjustment of a manufacturing process is necessary. In this paper, a view of the origins and recent work in the area of statistical process adjustment (SPA) is provided. A discussion of some topics open for further research is also given including new problems in semiconductor manufacturing process control. The goal of the paper is to help display the SPA field as a research area with its own identity and content, and promote further interest in its development and application in the industry.

UR - http://www.scopus.com/inward/record.url?scp=33746323927&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33746323927&partnerID=8YFLogxK

U2 - 10.1111/j.1467-9574.2006.00328.x

DO - 10.1111/j.1467-9574.2006.00328.x

M3 - Article

AN - SCOPUS:33746323927

VL - 60

SP - 309

EP - 326

JO - Statistica Neerlandica

JF - Statistica Neerlandica

SN - 0039-0402

IS - 3

ER -