Steady-state statistical sputtering model for extracting depth profiles from molecular dynamics simulations of dynamic SIMS

Robert J. Paruch, Zbigniew Postawa, Andreas Wucher, Barbara J. Garrison

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Recently a "divide and conquer" approach was developed to model by molecular dynamics (MD) simulations dynamic secondary ion mass spectrometry (SIMS) experiments in order to understand the important factors for depth profiling. Although root-mean-square (rms) roughness can be directly calculated from the simulations, calculating depth profiles is beyond the current capability of the MD simulations. The statistical sputtering model (SSM) of Krantzman and Wucher establishes the foundation for connecting information from the MD simulations to depth profiles. In this study, we revise the SSM to incorporate more extensive information from the MD simulations in the steady-state region, thus presenting the steady-state statistical sputtering model (SS-SSM). The revised model is utilized to interpret MD simulations of 20 keV C 60 bombardment of Ag at normal incidence as well as the effect of sample rotation on depth profiling.

Original languageEnglish (US)
Pages (from-to)1042-1051
Number of pages10
JournalJournal of Physical Chemistry C
Volume116
Issue number1
DOIs
StatePublished - Jan 12 2012

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Secondary ion mass spectrometry
secondary ion mass spectrometry
Sputtering
Molecular dynamics
sputtering
molecular dynamics
Computer simulation
profiles
Depth profiling
simulation
Surface roughness
bombardment
roughness
incidence
Experiments

All Science Journal Classification (ASJC) codes

  • Physical and Theoretical Chemistry
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Energy(all)

Cite this

Paruch, Robert J. ; Postawa, Zbigniew ; Wucher, Andreas ; Garrison, Barbara J. / Steady-state statistical sputtering model for extracting depth profiles from molecular dynamics simulations of dynamic SIMS. In: Journal of Physical Chemistry C. 2012 ; Vol. 116, No. 1. pp. 1042-1051.
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Steady-state statistical sputtering model for extracting depth profiles from molecular dynamics simulations of dynamic SIMS. / Paruch, Robert J.; Postawa, Zbigniew; Wucher, Andreas; Garrison, Barbara J.

In: Journal of Physical Chemistry C, Vol. 116, No. 1, 12.01.2012, p. 1042-1051.

Research output: Contribution to journalArticle

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