The reliability of MEMS is a key problem for its commercial application. The polysilicon microcantilever is a basic structure in MEMS. Mechanism of stiction failure of surfaces-micromachined microcantilever is introduced and a stiction reliability prediction model based on macro-mechanical theory and reliability method is presented. Finally the effect of micro-cantilever dimension and environment humidity on reliability is analyzed.
|Original language||English (US)|
|Number of pages||4|
|Journal||Chinese Journal of Sensors and Actuators|
|State||Published - Oct 2006|
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Electrical and Electronic Engineering