Stress Sensitivity of Micromachined AT-Cut Quartz Resonators Characterized Using Magnetostrictive Metglas Films

Nishit Goel, Srinivas Tadigadapa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

In this paper, stress sensitivity of micromachined A T -cut quartz cantilevers has been characterized by integrating micromachined AT-cut quartz cantilever-resonators with a magnetostrictive Metglas® 2605SAl thin film. The magnetostrictive material's properties were characterized by quantifying the dss-coefficient of the deposited films by the measurement of the out-of-plane deflection of the micro machined Metglas®-quartz unimorph cantilevers, using a laser Doppler vibrometer, as a function of applied magnetic field. The impedance characteristics at the bulk acoustic wave resonance of the quartz cantilever-resonator as a function of the applied magnetic field has also been characterized independently. Through these two measurements, quartz cantilever-resonators can be deduced to exhibit a sensitivity of 6.4 Hz/kPa of the film stress.

Original languageEnglish (US)
Title of host publication2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538647073
DOIs
StatePublished - Dec 26 2018
Event17th IEEE SENSORS Conference, SENSORS 2018 - New Delhi, India
Duration: Oct 28 2018Oct 31 2018

Publication series

NameProceedings of IEEE Sensors
Volume2018-October
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Other

Other17th IEEE SENSORS Conference, SENSORS 2018
CountryIndia
CityNew Delhi
Period10/28/1810/31/18

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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    Goel, N., & Tadigadapa, S. (2018). Stress Sensitivity of Micromachined AT-Cut Quartz Resonators Characterized Using Magnetostrictive Metglas Films. In 2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings [8589780] (Proceedings of IEEE Sensors; Vol. 2018-October). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSENS.2018.8589780