Structural and analytical studies of 4H silicon carbide MOSFETs with thermally grown oxides

Tsvetanka Zheleva, Igor Levin, Dan Habersat, Aivars Lelis, Morgen Dautrich, Patrick M. Lenahan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publication2005 International Semiconductor Device Research Symposium
Pages139-140
Number of pages2
StatePublished - Dec 1 2005
Event2005 International Semiconductor Device Research Symposium - Bethesda, MD, United States
Duration: Dec 7 2005Dec 9 2005

Publication series

Name2005 International Semiconductor Device Research Symposium
Volume2005

Other

Other2005 International Semiconductor Device Research Symposium
CountryUnited States
CityBethesda, MD
Period12/7/0512/9/05

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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