Studies of mist deposition in the fabrication of blue organic light emitting diodes

K. Shanmugasundaram, S. C. Price, W. Li, H. Jiang, J. Huang, Q. K. Wang, Y. Yang, J. Ruzyllo

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In this work, the process of mist deposition is explored as a method used to deposit organic semiconductors for applications in organic light emitting diodes (OLEDs). The deposition kinetics of a specially formulated hole transport agent is studied. The results indicate that the mist-deposited organic film thickness varies linearly with precursor concentration, deposition time and substrate potential. Depending upon process parameters, a deposition rate in the range of 50 nm min-1 is readily achievable. Evolution of surface roughness revealed distinct stages in the film formation process. The growth of secondary layers was observed before the formation of a complete initial film layer. A working OLED with the hole transport layer deposited by mist deposition was demonstrated. The luminance of the device was measured to be a maximum of 3000 cd m-2 and the efficiency was 6.7 cd A-1.

Original languageEnglish (US)
Article number075036
JournalSemiconductor Science and Technology
Issue number7
Publication statusPublished - Jul 1 2008


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Shanmugasundaram, K., Price, S. C., Li, W., Jiang, H., Huang, J., Wang, Q. K., ... Ruzyllo, J. (2008). Studies of mist deposition in the fabrication of blue organic light emitting diodes. Semiconductor Science and Technology, 23(7), [075036].