TY - GEN
T1 - Studies of parylene C microfibrous thin films electrical properties
AU - Khawaji, Ibrahim H.
AU - Awadelkarim, Osama O.
AU - Lakhtakia, Akhlesh
N1 - Publisher Copyright:
© 2016 The Electrochemical Society.
PY - 2016
Y1 - 2016
N2 - We have fabricated and measured the room-temperature capacitance in metal-insulator-metal (MIM) structures utilizing the Parylene C films as the insulators in the frequency range 1 kHz to 1 MHz. The Parylene-C films were of variable thicknesses and were either spin-on dense films or columnar microfibrous thin films (μFTFs) grown using oblique angle physicochemical vapor deposition. The values of the vapor tilt angle, Xv, used were 30°, 60°, or 90°. Expectedly, columnar microfibrous thin film of Parylene C is observed to have lower values of k than the dense one. However, it is observed that the dielectric constant of the ìFTFs is increased with increasing deposition tilt angle Xv. This is explained in terms of film porosity as a function of Xv, which is enhanced in films deposited at lower tilt angles. The dependence of k on measurement frequency suggests that molecular dipole effects dominate charge polarization in the films.
AB - We have fabricated and measured the room-temperature capacitance in metal-insulator-metal (MIM) structures utilizing the Parylene C films as the insulators in the frequency range 1 kHz to 1 MHz. The Parylene-C films were of variable thicknesses and were either spin-on dense films or columnar microfibrous thin films (μFTFs) grown using oblique angle physicochemical vapor deposition. The values of the vapor tilt angle, Xv, used were 30°, 60°, or 90°. Expectedly, columnar microfibrous thin film of Parylene C is observed to have lower values of k than the dense one. However, it is observed that the dielectric constant of the ìFTFs is increased with increasing deposition tilt angle Xv. This is explained in terms of film porosity as a function of Xv, which is enhanced in films deposited at lower tilt angles. The dependence of k on measurement frequency suggests that molecular dipole effects dominate charge polarization in the films.
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U2 - 10.1149/07505.0235ecst
DO - 10.1149/07505.0235ecst
M3 - Conference contribution
AN - SCOPUS:84991447188
T3 - ECS Transactions
SP - 235
EP - 243
BT - Semiconductors, Dielectrics, and Metals for Nanoelectronics 14
A2 - Kar, S.
A2 - Kita, K.
A2 - Landheer, D.
A2 - Misra, D.
PB - Electrochemical Society Inc.
T2 - Symposium on Semiconductors, Dielectrics, and Metals for Nanoelectronics 14 - PRiME 2016/230th ECS Meeting
Y2 - 2 October 2016 through 7 October 2016
ER -