19F(p, αγ)16O nuclear reaction analysis (NRA) technique has been used to quantitatively determine fluorine concentration and distribution in fluorinated polymeric films. By varying the proton beam energy over a suitable range and measuring the γ-ray yield at each step, combined with the knowledge of energy loss per unit length of the film, the fluorine depth profile is obtained. The diffusion of fluorine at the Al/PA-F (fluorinated parylene) interface is clearly identified after the sample is annealed at 450 °C for 2 h. Rutherford Backscattering Spectrometry (RBS) data gives similar results. Ion beam techniques provide an attractive method to characterize the stability of the metal-fluorinated film interface.
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics