Study of misaligned lateral combdrive static actuators

I. Avdeev, M. Lovell, Oladipo Onipede, Jr.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The misalignment of lateral combdrive fingers was studied using analytical and finite element techniques. Using the principle of virtual work, the required driving force, and the forces and moments that develop during in-plane combdrive misalignment were theoretically calculated. Electrostatic uncoupled 2-D and 3-D finite element models were then used to perform energy computations during misalignment. Finally, a stability analysis of misaligned combdrive fingers was performed using a coupled 2-D finite element approach. The analytical and numerical results were compared and found to vary due to fringing in the electrostatic fields. The significance of the fringing fields and stability equilibrium states were subsequently discussed with respect to the precision of MEMS devices.

Original languageEnglish (US)
Title of host publication2003 Nanotechnology Conference and Trade Show - Nanotech 2003
EditorsM. Laudon, B. Romanowicz
Pages570-573
Number of pages4
Volume2
StatePublished - 2003
Event2003 Nanotechnology Conference and Trade Show - Nanotech 2003 - San Francisco, CA, United States
Duration: Feb 23 2003Feb 27 2003

Other

Other2003 Nanotechnology Conference and Trade Show - Nanotech 2003
CountryUnited States
CitySan Francisco, CA
Period2/23/032/27/03

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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  • Cite this

    Avdeev, I., Lovell, M., & Onipede, Jr., O. (2003). Study of misaligned lateral combdrive static actuators. In M. Laudon, & B. Romanowicz (Eds.), 2003 Nanotechnology Conference and Trade Show - Nanotech 2003 (Vol. 2, pp. 570-573)