Study of scalable IBS nanopatterning mechanisms for III-V semiconductors using in-situ surface characterization

Jean Paul Allain, Osman El-Atwani, Alex Cimaroli, Daniel L. Rokusek, Sami Ortoleva, Anastassiya Suslova

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy