Study on a flexoelectric microphone using barium strontium titanate

S. R. Kwon, W. B. Huang, S. J. Zhang, F. G. Yuan, X. N. Jiang

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm 768 μm 50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.

Original languageEnglish (US)
Article number045001
JournalJournal of Micromechanics and Microengineering
Volume26
Issue number4
DOIs
StatePublished - Feb 22 2016

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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