Study on a flexoelectric microphone using barium strontium titanate

S. R. Kwon, W. B. Huang, S. J. Zhang, F. G. Yuan, X. N. Jiang

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm 768 μm 50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.

Original languageEnglish (US)
Article number045001
JournalJournal of Micromechanics and Microengineering
Volume26
Issue number4
DOIs
StatePublished - Feb 22 2016

Fingerprint

Barium strontium titanate
Microphones
Silicon
Signal to noise ratio
Substrates

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Kwon, S. R. ; Huang, W. B. ; Zhang, S. J. ; Yuan, F. G. ; Jiang, X. N. / Study on a flexoelectric microphone using barium strontium titanate. In: Journal of Micromechanics and Microengineering. 2016 ; Vol. 26, No. 4.
@article{bba5d8adc5734ec3954f6352e43033ae,
title = "Study on a flexoelectric microphone using barium strontium titanate",
abstract = "In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm 768 μm 50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.",
author = "Kwon, {S. R.} and Huang, {W. B.} and Zhang, {S. J.} and Yuan, {F. G.} and Jiang, {X. N.}",
year = "2016",
month = "2",
day = "22",
doi = "10.1088/0960-1317/26/4/045001",
language = "English (US)",
volume = "26",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "4",

}

Study on a flexoelectric microphone using barium strontium titanate. / Kwon, S. R.; Huang, W. B.; Zhang, S. J.; Yuan, F. G.; Jiang, X. N.

In: Journal of Micromechanics and Microengineering, Vol. 26, No. 4, 045001, 22.02.2016.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Study on a flexoelectric microphone using barium strontium titanate

AU - Kwon, S. R.

AU - Huang, W. B.

AU - Zhang, S. J.

AU - Yuan, F. G.

AU - Jiang, X. N.

PY - 2016/2/22

Y1 - 2016/2/22

N2 - In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm 768 μm 50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.

AB - In this study, a flexoelectric microphone was, for the first time, designed and fabricated in a bridge structure using barium strontium titanate (Ba0.65Sr0.35TiO3) ceramic and tested afterwards. The prototyped flexoelectric microphone consists of a 1.5 mm 768 μm 50 μm BST bridge structure and a silicon substrate with a cavity. The sensitivity and resonance frequency were designed to be 0.92 pC/Pa and 98.67 kHz, respectively. The signal to noise ratio was measured to be 74 dB. The results demonstrate that the flexoelectric microphone possesses high sensitivity and a wide working frequency range simultaneously, suggesting that flexoelectricity could be an excellent alternative sensing mechanism for microphone applications.

UR - http://www.scopus.com/inward/record.url?scp=84962148720&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84962148720&partnerID=8YFLogxK

U2 - 10.1088/0960-1317/26/4/045001

DO - 10.1088/0960-1317/26/4/045001

M3 - Article

AN - SCOPUS:84962148720

VL - 26

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 4

M1 - 045001

ER -