SU-8 lift-off patterned silicone chemical vapor sensor arrays

Victor T.S. Wong, Adam Huang, Chih Ming Ho

Research output: Chapter in Book/Report/Conference proceedingConference contribution

15 Scopus citations

Abstract

This paper reports on the fabrication and preliminary characterizations of our micro-machined silicone/carbon black chemical vapor sensor arrays. By utilizing SU-8 lift-off technique, we have successfully patterned room temperature vulcanizing (RTV) polymers down to 25 μm feature size using low resolution mask (with line-width of 5 - 10μm) with yields in excess of 90% throughout a 4" silicon wafer. Based on this technique, we have fabricated the smallest functional polymer/carbon black based chemical vapor sensor (60×60×25μm3) reported in the literature known to the authors thus far. Preliminary characterizations showed that the sensors are capable of sensing alcohols and acetone in the range from 2.5ppth to 12.5ppth with response time down to 5 seconds.

Original languageEnglish (US)
Title of host publicationProceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest
Pages754-757
Number of pages4
DOIs
StatePublished - 2005
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: Jan 30 2005Feb 3 2005

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami
CountryUnited States
CityMiami Beach, FL
Period1/30/052/3/05

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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