The growth of MgB2 thin films by hybrid physical-chemical vapor deposition (HPCVD) was discussed. 4H-SiC and 6H-SiC, the polytypes of silicon carbide single crystals, were used as the substrates for the purpose. The chemical stability of SiC against the reactions with Mg, B, Mg-B compounds under HPCVD deposition conditions was shown by thermodynamic calculations. SiC was found as the most suitable substrate for MgB2 thin films.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)