Superhydrophobic CF x coating via in-line atmospheric RF plasma of He-CF 4-H 2

Seong H. Kim, Jeong Hoon Kim, Bang Kwon Kang, Han S. Uhm

Research output: Contribution to journalArticlepeer-review

118 Scopus citations


Stable superhydrophobic coatings on various substrates are attained with an in-line atmospheric rf plasma process using CF 4, H 2, and He. The coating layer is composed of CF x nanoparticulates and has an average roughness of ∼10 nm. This roughness is much smaller than other surfaces reported for superhydrophobicity in the literature. The superhydrophobic coatings are produced on both metallic and insulating substrates without any need of separate microroughening or vacuum lines.

Original languageEnglish (US)
Pages (from-to)12213-12217
Number of pages5
Issue number26
StatePublished - Dec 20 2005

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Spectroscopy
  • Electrochemistry


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