Pb(In0.5Nb0.5)O3¿Pb(Mg 1/3Nb2/3)O3¿PbTiO3 (PIN¿PMN¿PT) resonators for surface acoustic load sensing are presented in this paper. Different acoustic loads are applied to thickness mode, thickness-shear mode, and face-shear mode resonators, and the electrical impedances at resonance and anti-resonance frequencies are recorded. More than one order of magnitude higher sensitivity (ratio of electrical impedance change to surface acoustic impedance change) at the resonance is achieved for the face-shear-mode resonator compared with other resonators with the same dimensions. The Krimholtz, Leedom, and Matthaei (KLM) model is used to verify the surface acoustic loading effect on the electrical impedance spectrum of face-shear PIN¿PMN¿PT single-crystal resonators. The demonstrated high sensitivity of face-shear mode resonators to surface loads is promising for a broad range of applications, including artificial skin, biological and chemical sensors, touch screens, and other touch-based sensors.
|Original language||English (US)|
|Number of pages||7|
|Journal||IEEE transactions on ultrasonics, ferroelectrics, and frequency control|
|State||Published - 2012|
All Science Journal Classification (ASJC) codes
- Acoustics and Ultrasonics
- Electrical and Electronic Engineering