Development of practical SWCNT-based chemical sensors is impeded because of difficulties in controlling both orientation/morphology in a MEMs-based sensor platform and the purity of nano-material. Methods to purify CNTs, prior to and following device fabrication are described. More critically, methodology to control the physical morphology of SWCNT on a MEMs platform has been applied for sensor applications. copyright The Electrochemical Society.
|Original language||English (US)|
|Number of pages||7|
|State||Published - 2006|
|Event||Sensors, Actuators, and Microsystems - 208th Electrochemical Society Meeting - Los Angeles, CA, United States|
Duration: Oct 16 2005 → Oct 21 2005
All Science Journal Classification (ASJC) codes