SURFACE CHEMICAL STUDIES OF OXIDES AND NITRIDES.

Carlo G. Pantano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The application of surface analysis techniques for the study of fundamental surface and thin film phenomena is described. The topics covered relate to the processing and fabrication of electronic packages and include: evaporation/condensation during the thermal processing of glasses, hydration of glass surfaces and thin films, nitridation of silica films, diffusion behavior in oxides at low temperature, and impurity segregation in thin films. A wide variety of surface analytical methods are exemplified including Auger electron spectroscopy (AES), ion-scattering spectroscopy (ISS), nuclear reaction analysis (NRA), secondary-ion mass spectroscopy (SIMS) and x-ray photoelectron spectroscopy (XPS).

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
PublisherMaterials Research Soc
Pages303-316
Number of pages14
ISBN (Print)0931837057
StatePublished - Dec 1 1985

Publication series

NameMaterials Research Society Symposia Proceedings
Volume40
ISSN (Print)0272-9172

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'SURFACE CHEMICAL STUDIES OF OXIDES AND NITRIDES.'. Together they form a unique fingerprint.

  • Cite this

    Pantano, C. G. (1985). SURFACE CHEMICAL STUDIES OF OXIDES AND NITRIDES. In Materials Research Society Symposia Proceedings (pp. 303-316). (Materials Research Society Symposia Proceedings; Vol. 40). Materials Research Soc.