A unique method for surface profile measurement is described. A microtube attached with an objective microlens is used to scan the sample surface so that the surface profile can be obtained. The unique features of using a microtube are low alignment requirement and high robustness. With different focal lengths of microlenses, we could get a depth measurement range from 10 to 400 μm with a submicron to nm range depth resolution. To verify the feasibility of the proposed system, a profile obtained by this method is compared with the result obtained by using conventional stylus measurement. The results from the two methods are consistent.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Physical and Theoretical Chemistry
- Electrical and Electronic Engineering