Surface profile measurement using a unique microtube-based system

Shizhuo Yin, Jiang Li, Minho Song

    Research output: Contribution to journalArticle

    8 Scopus citations

    Abstract

    A unique method for surface profile measurement is described. A microtube attached with an objective microlens is used to scan the sample surface so that the surface profile can be obtained. The unique features of using a microtube are low alignment requirement and high robustness. With different focal lengths of microlenses, we could get a depth measurement range from 10 to 400 μm with a submicron to nm range depth resolution. To verify the feasibility of the proposed system, a profile obtained by this method is compared with the result obtained by using conventional stylus measurement. The results from the two methods are consistent.

    Original languageEnglish (US)
    Pages (from-to)1-6
    Number of pages6
    JournalOptics Communications
    Volume168
    Issue number1
    DOIs
    StatePublished - Sep 1 1999

    All Science Journal Classification (ASJC) codes

    • Electronic, Optical and Magnetic Materials
    • Atomic and Molecular Physics, and Optics
    • Physical and Theoretical Chemistry
    • Electrical and Electronic Engineering

    Fingerprint Dive into the research topics of 'Surface profile measurement using a unique microtube-based system'. Together they form a unique fingerprint.

  • Cite this