Surface profile measurement using chromatic confocal microscopy

Kebin Shi, Peng Li, Shizhuo Yin, Zhiwen Liu

Research output: Contribution to journalConference articlepeer-review

3 Scopus citations

Abstract

We investigate lateral and axial chromatic confocal microscopy using supercontinuum white light, and its application to surface profile measurement. In the systems that we describe here, the lateral or the axial scanning is effectively realized by focusing different wavelengths of the supercontinuum to either different lateral or axial positions through purposely introduced chromatic dispersion and aberration respectively. As a result, the imaging speed can be greatly improved. We use this system to demonstrate the surface profile measurement of a microcircuit chip, with a sensitivity of 8.5 nm and a depth measurement range of about 7 μm.

Original languageEnglish (US)
Article number19
Pages (from-to)124-131
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5606
DOIs
StatePublished - Dec 1 2004
EventTwo- and Three-Dimensional Vision Systems for Inspection, Control, and Metrology II - Philadelphia, PA, United States
Duration: Oct 26 2004Oct 27 2004

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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